Thermo-optic switch using fluorinated silicon oxide and organic spin-on-glass films

Hiroyasu Kondo, Kazuaki Inohara, Yuki Taniguchi, Junko Nakahata, Tetsuya Homma, Hideo Takahashi

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A thermo-optic switch in a thin-film optical waveguide was investigated. Fluorinated silicon oxide (SiOF) and organic spin-on-glass (SOG) films were used as core-layer and clad-layer, respectively, in the waveguide structure. The SiOF films were formed at 23°C by a liquid-phase deposition (LPD) technique using a supersaturated hydrofluosilicic acid (H2SiF6) aqueous solution. Thermal coefficients of the refractive indices for LPD-SiOF and organic SOG films formed on silicon (Si) substrates were -4.0 × 10-6/°C, -60 × 10-6/°C at the wavelength of 632.8 nm, respectively. A high extinction ratio of 15 dB was obtained for this switch at the applied voltage of 12.8 V.

Original languageEnglish
Pages (from-to)323-325
Number of pages3
JournalOptical Review
Volume8
Issue number5
Publication statusPublished - 2001 Sep

Fingerprint

silicon oxides
switches
optics
glass
liquid phases
optical waveguides
extinction
refractivity
aqueous solutions
waveguides
acids
electric potential
silicon
coefficients
thin films
wavelengths

Keywords

  • Fluorinated silicon oxide
  • Optical switch
  • Spin-on-glass
  • Thermo-optic effect
  • Thin-film optical waveguide

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Kondo, H., Inohara, K., Taniguchi, Y., Nakahata, J., Homma, T., & Takahashi, H. (2001). Thermo-optic switch using fluorinated silicon oxide and organic spin-on-glass films. Optical Review, 8(5), 323-325.

Thermo-optic switch using fluorinated silicon oxide and organic spin-on-glass films. / Kondo, Hiroyasu; Inohara, Kazuaki; Taniguchi, Yuki; Nakahata, Junko; Homma, Tetsuya; Takahashi, Hideo.

In: Optical Review, Vol. 8, No. 5, 09.2001, p. 323-325.

Research output: Contribution to journalArticle

Kondo, H, Inohara, K, Taniguchi, Y, Nakahata, J, Homma, T & Takahashi, H 2001, 'Thermo-optic switch using fluorinated silicon oxide and organic spin-on-glass films', Optical Review, vol. 8, no. 5, pp. 323-325.
Kondo H, Inohara K, Taniguchi Y, Nakahata J, Homma T, Takahashi H. Thermo-optic switch using fluorinated silicon oxide and organic spin-on-glass films. Optical Review. 2001 Sep;8(5):323-325.
Kondo, Hiroyasu ; Inohara, Kazuaki ; Taniguchi, Yuki ; Nakahata, Junko ; Homma, Tetsuya ; Takahashi, Hideo. / Thermo-optic switch using fluorinated silicon oxide and organic spin-on-glass films. In: Optical Review. 2001 ; Vol. 8, No. 5. pp. 323-325.
@article{58314e12fd9540f08cdcc475f215e265,
title = "Thermo-optic switch using fluorinated silicon oxide and organic spin-on-glass films",
abstract = "A thermo-optic switch in a thin-film optical waveguide was investigated. Fluorinated silicon oxide (SiOF) and organic spin-on-glass (SOG) films were used as core-layer and clad-layer, respectively, in the waveguide structure. The SiOF films were formed at 23°C by a liquid-phase deposition (LPD) technique using a supersaturated hydrofluosilicic acid (H2SiF6) aqueous solution. Thermal coefficients of the refractive indices for LPD-SiOF and organic SOG films formed on silicon (Si) substrates were -4.0 × 10-6/°C, -60 × 10-6/°C at the wavelength of 632.8 nm, respectively. A high extinction ratio of 15 dB was obtained for this switch at the applied voltage of 12.8 V.",
keywords = "Fluorinated silicon oxide, Optical switch, Spin-on-glass, Thermo-optic effect, Thin-film optical waveguide",
author = "Hiroyasu Kondo and Kazuaki Inohara and Yuki Taniguchi and Junko Nakahata and Tetsuya Homma and Hideo Takahashi",
year = "2001",
month = "9",
language = "English",
volume = "8",
pages = "323--325",
journal = "Optical Review",
issn = "1340-6000",
publisher = "Springer-Verlag GmbH and Co. KG",
number = "5",

}

TY - JOUR

T1 - Thermo-optic switch using fluorinated silicon oxide and organic spin-on-glass films

AU - Kondo, Hiroyasu

AU - Inohara, Kazuaki

AU - Taniguchi, Yuki

AU - Nakahata, Junko

AU - Homma, Tetsuya

AU - Takahashi, Hideo

PY - 2001/9

Y1 - 2001/9

N2 - A thermo-optic switch in a thin-film optical waveguide was investigated. Fluorinated silicon oxide (SiOF) and organic spin-on-glass (SOG) films were used as core-layer and clad-layer, respectively, in the waveguide structure. The SiOF films were formed at 23°C by a liquid-phase deposition (LPD) technique using a supersaturated hydrofluosilicic acid (H2SiF6) aqueous solution. Thermal coefficients of the refractive indices for LPD-SiOF and organic SOG films formed on silicon (Si) substrates were -4.0 × 10-6/°C, -60 × 10-6/°C at the wavelength of 632.8 nm, respectively. A high extinction ratio of 15 dB was obtained for this switch at the applied voltage of 12.8 V.

AB - A thermo-optic switch in a thin-film optical waveguide was investigated. Fluorinated silicon oxide (SiOF) and organic spin-on-glass (SOG) films were used as core-layer and clad-layer, respectively, in the waveguide structure. The SiOF films were formed at 23°C by a liquid-phase deposition (LPD) technique using a supersaturated hydrofluosilicic acid (H2SiF6) aqueous solution. Thermal coefficients of the refractive indices for LPD-SiOF and organic SOG films formed on silicon (Si) substrates were -4.0 × 10-6/°C, -60 × 10-6/°C at the wavelength of 632.8 nm, respectively. A high extinction ratio of 15 dB was obtained for this switch at the applied voltage of 12.8 V.

KW - Fluorinated silicon oxide

KW - Optical switch

KW - Spin-on-glass

KW - Thermo-optic effect

KW - Thin-film optical waveguide

UR - http://www.scopus.com/inward/record.url?scp=0035542456&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035542456&partnerID=8YFLogxK

M3 - Article

VL - 8

SP - 323

EP - 325

JO - Optical Review

JF - Optical Review

SN - 1340-6000

IS - 5

ER -