Three D Flexible Vibration Structure Design and Its Fabrication for Micro Energy Harvesting

Koei Takeda, Sumito Nagasawa, Hiroki Kuwano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)175-178
JournalProceedings of PowerMEMS2010
Publication statusPublished - 2010 Dec 1

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