Three dimensional characterization of Xe inclusions ion-implanted in al

M. Song, H. Matsumoto, M. Shimojo, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1376-1377
Number of pages2
JournalMicroscopy and Microanalysis
Volume15
Issue numberSUPPL. 2
DOIs
Publication statusPublished - 2009 Jul 1
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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