Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

Original languageEnglish
Title of host publicationInternational Conference on Lasers, Applications, and Technologies 2007
Subtitle of host publicationLaser-assisted Micro- and Nanotechnologies
DOIs
Publication statusPublished - 2007
EventInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus
Duration: 2007 May 282007 Jun 1

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6732
ISSN (Print)0277-786X

Conference

ConferenceInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
CountryBelarus
CityMinsk
Period07/5/2807/6/1

Keywords

  • Ablation
  • Dielectric breakdown
  • Field enhancement
  • Laser microfabrication
  • Light extraction
  • Ripples

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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