Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6732
DOIs
Publication statusPublished - 2007
Externally publishedYes
EventInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk
Duration: 2007 May 282007 Jun 1

Other

OtherInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
CityMinsk
Period07/5/2807/6/1

Fingerprint

Microfabrication
ripples
Semiconductor materials
Lasers
Metals
metals
raster scanning
lasers
Laser beam effects
Ultrashort pulses
Scanning
irradiation
augmentation
cross sections

Keywords

  • Ablation
  • Dielectric breakdown
  • Field enhancement
  • Laser microfabrication
  • Light extraction
  • Ripples

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Tanaka, S., & Misawa, H. (2007). Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6732). [67320B] https://doi.org/10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. / Juodkazis, Saulius; Nishimura, Koichi; Okuno, Hiroki; Tabuchi, Yusuke; Matsuo, Shigeki; Tanaka, Satoru; Misawa, Hiroaki.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6732 2007. 67320B.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Juodkazis, S, Nishimura, K, Okuno, H, Tabuchi, Y, Matsuo, S, Tanaka, S & Misawa, H 2007, Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 6732, 67320B, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, Minsk, 07/5/28. https://doi.org/10.1117/12.751889
Juodkazis S, Nishimura K, Okuno H, Tabuchi Y, Matsuo S, Tanaka S et al. Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6732. 2007. 67320B https://doi.org/10.1117/12.751889
Juodkazis, Saulius ; Nishimura, Koichi ; Okuno, Hiroki ; Tabuchi, Yusuke ; Matsuo, Shigeki ; Tanaka, Satoru ; Misawa, Hiroaki. / Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6732 2007.
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