Three-dimensional micro-channels in polymers: One-step fabrication

K. Yamasaki, S. Juodkazis, Shigeki Matsuo, H. Misawa

Research output: Contribution to journalArticle

58 Citations (Scopus)

Abstract

We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.

Original languageEnglish
Pages (from-to)371-373
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Volume77
Issue number3-4
DOIs
Publication statusPublished - 2003 Aug
Externally publishedYes

Fingerprint

Polymers
fluidics
Fluidics
Polymethyl Methacrylate
Fabrication
fabrication
polymers
photonics
cross sections
systems analysis
Photonic crystals
Ultrashort pulses
Electric breakdown
irradiance
Photonics
micrometers
breakdown
chips
Irradiation
irradiation

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Three-dimensional micro-channels in polymers : One-step fabrication. / Yamasaki, K.; Juodkazis, S.; Matsuo, Shigeki; Misawa, H.

In: Applied Physics A: Materials Science and Processing, Vol. 77, No. 3-4, 08.2003, p. 371-373.

Research output: Contribution to journalArticle

@article{d2dd8c386b92488cb1f23233f6eacba5,
title = "Three-dimensional micro-channels in polymers: One-step fabrication",
abstract = "We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.",
author = "K. Yamasaki and S. Juodkazis and Shigeki Matsuo and H. Misawa",
year = "2003",
month = "8",
doi = "10.1007/s00339-003-2191-8",
language = "English",
volume = "77",
pages = "371--373",
journal = "Applied Physics",
issn = "0340-3793",
publisher = "Springer Heidelberg",
number = "3-4",

}

TY - JOUR

T1 - Three-dimensional micro-channels in polymers

T2 - One-step fabrication

AU - Yamasaki, K.

AU - Juodkazis, S.

AU - Matsuo, Shigeki

AU - Misawa, H.

PY - 2003/8

Y1 - 2003/8

N2 - We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.

AB - We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.

UR - http://www.scopus.com/inward/record.url?scp=0042658349&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042658349&partnerID=8YFLogxK

U2 - 10.1007/s00339-003-2191-8

DO - 10.1007/s00339-003-2191-8

M3 - Article

AN - SCOPUS:0042658349

VL - 77

SP - 371

EP - 373

JO - Applied Physics

JF - Applied Physics

SN - 0340-3793

IS - 3-4

ER -