Three-dimensional micro-channels in polymers: One-step fabrication

K. Yamasaki, S. Juodkazis, S. Matsuo, H. Misawa

Research output: Contribution to journalArticle

63 Citations (Scopus)

Abstract

We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals.

Original languageEnglish
Pages (from-to)371-373
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Volume77
Issue number3-4
DOIs
Publication statusPublished - 2003 Aug 1

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

Fingerprint Dive into the research topics of 'Three-dimensional micro-channels in polymers: One-step fabrication'. Together they form a unique fingerprint.

  • Cite this