Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo; Kazuhiko Yamasaki; Saulius Juodkazis; Shigeki Matsuo; Vygantas Mizeikis; Hiroaki Misawa

doi:10.1016/j.tsf.2003.11.180

Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo, Kazuhiko Yamasaki, Saulius Juodkazis, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

Research output: Contribution to journal › Conference article › peer-review

44 Citations (Scopus)

Abstract

We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

Original language	English
Pages (from-to)	550-556
Number of pages	7
Journal	Thin Solid Films
Volume	453-454
DOIs	https://doi.org/10.1016/j.tsf.2003.11.180
Publication status	Published - 2004 Apr 1
Externally published	Yes
Event	Proceedings of Symposium H on Photonic Processing of Surfaces - Strasbourg, France Duration: 2003 Jun 10 → 2003 Jun 13

Keywords

Dielectric breakdown
Femtosecond laser microfabrication
Micro-fabrication
Nano-fabrication
Polymers
Polymethylmethacrylate (PMMA)

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2003.11.180

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title = "Three-dimensional microfabrication by femtosecond pulses in dielectrics",

abstract = "We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.",

keywords = "Dielectric breakdown, Femtosecond laser microfabrication, Micro-fabrication, Nano-fabrication, Polymers, Polymethylmethacrylate (PMMA)",

author = "Toshiaki Kondo and Kazuhiko Yamasaki and Saulius Juodkazis and Shigeki Matsuo and Vygantas Mizeikis and Hiroaki Misawa",

note = "Funding Information: This work was partially supported by The Satellite Venture Business Laboratory (SVBL) of the University of Tokushima and by the Aerospace R&D contract No. F62562-03-P-0208 AOARD 02-35.; Proceedings of Symposium H on Photonic Processing of Surfaces ; Conference date: 10-06-2003 Through 13-06-2003",

year = "2004",

month = apr,

day = "1",

doi = "10.1016/j.tsf.2003.11.180",

language = "English",

volume = "453-454",

pages = "550--556",

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T1 - Three-dimensional microfabrication by femtosecond pulses in dielectrics

AU - Kondo, Toshiaki

AU - Yamasaki, Kazuhiko

AU - Juodkazis, Saulius

AU - Matsuo, Shigeki

AU - Mizeikis, Vygantas

AU - Misawa, Hiroaki

N1 - Funding Information: This work was partially supported by The Satellite Venture Business Laboratory (SVBL) of the University of Tokushima and by the Aerospace R&D contract No. F62562-03-P-0208 AOARD 02-35.

PY - 2004/4/1

Y1 - 2004/4/1

N2 - We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

AB - We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

KW - Dielectric breakdown

KW - Femtosecond laser microfabrication

KW - Micro-fabrication

KW - Nano-fabrication

KW - Polymers

KW - Polymethylmethacrylate (PMMA)

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U2 - 10.1016/j.tsf.2003.11.180

DO - 10.1016/j.tsf.2003.11.180

M3 - Conference article

AN - SCOPUS:1542740305

SN - 0040-6090

VL - 453-454

SP - 550

EP - 556

JO - Thin Solid Films

JF - Thin Solid Films

T2 - Proceedings of Symposium H on Photonic Processing of Surfaces

Y2 - 10 June 2003 through 13 June 2003

ER -

Three-dimensional microfabrication by femtosecond pulses in dielectrics

Abstract

Keywords

ASJC Scopus subject areas

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