Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo, Kazuhiko Yamasaki, Saulius Juodkazis, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

Research output: Contribution to journalConference article

41 Citations (Scopus)

Abstract

We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

Original languageEnglish
Pages (from-to)550-556
Number of pages7
JournalThin Solid Films
Volume453-454
DOIs
Publication statusPublished - 2004 Apr 1
Externally publishedYes
EventProceedings of Symposium H on Photonic Processing of Surfaces - Strasbourg, France
Duration: 2003 Jun 102003 Jun 13

Keywords

  • Dielectric breakdown
  • Femtosecond laser microfabrication
  • Micro-fabrication
  • Nano-fabrication
  • Polymers
  • Polymethylmethacrylate (PMMA)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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  • Cite this

    Kondo, T., Yamasaki, K., Juodkazis, S., Matsuo, S., Mizeikis, V., & Misawa, H. (2004). Three-dimensional microfabrication by femtosecond pulses in dielectrics. Thin Solid Films, 453-454, 550-556. https://doi.org/10.1016/j.tsf.2003.11.180