Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo, Kazuhiko Yamasaki, Saulius Juodkazis, Shigeki Matsuo, Vygantas Mizeikis, Hiroaki Misawa

Research output: Contribution to journalArticle

40 Citations (Scopus)

Abstract

We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling.

Original languageEnglish
Pages (from-to)550-556
Number of pages7
JournalThin Solid Films
Volume453-454
DOIs
Publication statusPublished - 2004 Apr 1
Externally publishedYes

Fingerprint

Microfabrication
Photoresists
Ultrashort pulses
photoresists
Modulation
modulation
Periodic structures
Polymethyl Methacrylate
numerical aperture
microchannels
Microchannels
pulses
ripples
lasers
Lenses
recording
lenses
scalars
interference
Glass

Keywords

  • Dielectric breakdown
  • Femtosecond laser microfabrication
  • Micro-fabrication
  • Nano-fabrication
  • Polymers
  • Polymethylmethacrylate (PMMA)

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Kondo, T., Yamasaki, K., Juodkazis, S., Matsuo, S., Mizeikis, V., & Misawa, H. (2004). Three-dimensional microfabrication by femtosecond pulses in dielectrics. Thin Solid Films, 453-454, 550-556. https://doi.org/10.1016/j.tsf.2003.11.180

Three-dimensional microfabrication by femtosecond pulses in dielectrics. / Kondo, Toshiaki; Yamasaki, Kazuhiko; Juodkazis, Saulius; Matsuo, Shigeki; Mizeikis, Vygantas; Misawa, Hiroaki.

In: Thin Solid Films, Vol. 453-454, 01.04.2004, p. 550-556.

Research output: Contribution to journalArticle

Kondo, T, Yamasaki, K, Juodkazis, S, Matsuo, S, Mizeikis, V & Misawa, H 2004, 'Three-dimensional microfabrication by femtosecond pulses in dielectrics', Thin Solid Films, vol. 453-454, pp. 550-556. https://doi.org/10.1016/j.tsf.2003.11.180
Kondo, Toshiaki ; Yamasaki, Kazuhiko ; Juodkazis, Saulius ; Matsuo, Shigeki ; Mizeikis, Vygantas ; Misawa, Hiroaki. / Three-dimensional microfabrication by femtosecond pulses in dielectrics. In: Thin Solid Films. 2004 ; Vol. 453-454. pp. 550-556.
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