Three-dimensional microstructures created by laser microfabrication technology

Makoto Horiyama, Hong Bo Sun, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Three-dimensional microstructures with aspect ratios larger than 20 and a solidified wall with a thickness down to 2.0 μm have been fabricated by the one-photon absorption photopolymerization technique. Lateral and longitudinal spatial resolutions in a single-line scanning process of as high as 1.0 μm and 0.3 μm, respectively, are reproducible. An experimental system consisting of a common picosecond pulsed laser and an optical microscope makes laser microfabrication easy to realize, implying a broad application potential.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume38
Issue number2 B
Publication statusPublished - 1999
Externally publishedYes

Fingerprint

Photopolymerization
Microfabrication
optical microscopes
Pulsed lasers
aspect ratio
Aspect ratio
pulsed lasers
Microscopes
Photons
spatial resolution
Scanning
microstructure
Microstructure
scanning
Lasers
photons
lasers

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Three-dimensional microstructures created by laser microfabrication technology. / Horiyama, Makoto; Sun, Hong Bo; Miwa, Masafumi; Matsuo, Shigeki; Misawa, Hiroaki.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 38, No. 2 B, 1999.

Research output: Contribution to journalArticle

Horiyama, Makoto ; Sun, Hong Bo ; Miwa, Masafumi ; Matsuo, Shigeki ; Misawa, Hiroaki. / Three-dimensional microstructures created by laser microfabrication technology. In: Japanese Journal of Applied Physics, Part 2: Letters. 1999 ; Vol. 38, No. 2 B.
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