TY - JOUR
T1 - Three-dimensional microstructures created by laser microfabrication technology
AU - Horiyama, Makoto
AU - Sun, Hong Bo
AU - Miwa, Masafumi
AU - Matsuo, Shigeki
AU - Misawa, Hiroaki
PY - 1999
Y1 - 1999
N2 - Three-dimensional microstructures with aspect ratios larger than 20 and a solidified wall with a thickness down to 2.0 μm have been fabricated by the one-photon absorption photopolymerization technique. Lateral and longitudinal spatial resolutions in a single-line scanning process of as high as 1.0 μm and 0.3 μm, respectively, are reproducible. An experimental system consisting of a common picosecond pulsed laser and an optical microscope makes laser microfabrication easy to realize, implying a broad application potential.
AB - Three-dimensional microstructures with aspect ratios larger than 20 and a solidified wall with a thickness down to 2.0 μm have been fabricated by the one-photon absorption photopolymerization technique. Lateral and longitudinal spatial resolutions in a single-line scanning process of as high as 1.0 μm and 0.3 μm, respectively, are reproducible. An experimental system consisting of a common picosecond pulsed laser and an optical microscope makes laser microfabrication easy to realize, implying a broad application potential.
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U2 - 10.1143/JJAP.38.L212
DO - 10.1143/JJAP.38.L212
M3 - Article
AN - SCOPUS:0032632213
SN - 0021-4922
VL - 38
SP - L212-L215
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 2 B
ER -