Three-dimensional microstructures created by laser microfabrication technology

Makoto Horiyama, Hong Bo Sun, Masafumi Miwa, Shigeki Matsuo, Hiroaki Misawa

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Three-dimensional microstructures with aspect ratios larger than 20 and a solidified wall with a thickness down to 2.0 μm have been fabricated by the one-photon absorption photopolymerization technique. Lateral and longitudinal spatial resolutions in a single-line scanning process of as high as 1.0 μm and 0.3 μm, respectively, are reproducible. An experimental system consisting of a common picosecond pulsed laser and an optical microscope makes laser microfabrication easy to realize, implying a broad application potential.

Original languageEnglish
Pages (from-to)L212-L215
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume38
Issue number2 B
DOIs
Publication statusPublished - 1999 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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