Three-dimensional observation of SiO2 hollow spheres with a double-shell structure using aberration-corrected scanning confocal electron microscopy

Xiaobin Zhang, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Peng Wang, Peter D. Nellist, Angus I. Kirkland, Meguru Tezuka, Masayuki Shimojo

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Optical sectioning using scanning confocal electron microscopy (SCEM) is a new three-dimensional (3D) imaging technique which promises improved depth resolution, particularly for laterally extended objects. Using a stage-scanning system to move the specimen in three dimensions, two-dimensional (2D) images sliced from any plane in XYZ space can be obtained in shorter acquisition times than those required for conventional electron tomography. In this paper, a double aberration-corrected SCEM used in annular dark-field mode was used to observe the 3D structure of SiO2 hollow spheres fabricated by a carbon template method. The double-shell structure of the sample was clearly reflected in both XY- and XZ-sliced images. However, elongation along the optical axis was still evident in the XZ-sliced images even when double aberration correctors were used. Application of a deconvolution technique to the experimental XZ-sliced images reduced the elongated shell thicknesses of the SiO2 sphere by 40-50 and the selectivity of information at a certain sample depth was also enhanced. Subsequently, 3D reconstruction by stacking the deconvoluted slice images restored the spherical surface of a SiO2 sphere. The Author 2012. Published by Oxford University Press [on behalf of Japanese Society of Microscopy]. All rights reserved.

Original languageEnglish
Pages (from-to)159-169
Number of pages11
JournalJournal of Electron Microscopy
Volume61
Issue number3
DOIs
Publication statusPublished - 2012 Jun

Fingerprint

Confocal microscopy
Aberrations
Electron microscopy
aberration
hollow
Scanning
scanning electron microscopy
Deconvolution
Laser modes
Tomography
Elongation
Microscopic examination
Imaging techniques
Carbon
Electrons
imaging techniques
elongation
acquisition
templates
tomography

Keywords

  • 3D observation and reconstruction
  • aberration-corrected ADF-SCEM
  • deconvolution
  • depth resolution
  • optical sectioning
  • pinhole
  • SiO hollow sphere
  • stage-scanning system

ASJC Scopus subject areas

  • Instrumentation

Cite this

Three-dimensional observation of SiO2 hollow spheres with a double-shell structure using aberration-corrected scanning confocal electron microscopy. / Zhang, Xiaobin; Takeguchi, Masaki; Hashimoto, Ayako; Mitsuishi, Kazutaka; Wang, Peng; Nellist, Peter D.; Kirkland, Angus I.; Tezuka, Meguru; Shimojo, Masayuki.

In: Journal of Electron Microscopy, Vol. 61, No. 3, 06.2012, p. 159-169.

Research output: Contribution to journalArticle

Zhang, Xiaobin ; Takeguchi, Masaki ; Hashimoto, Ayako ; Mitsuishi, Kazutaka ; Wang, Peng ; Nellist, Peter D. ; Kirkland, Angus I. ; Tezuka, Meguru ; Shimojo, Masayuki. / Three-dimensional observation of SiO2 hollow spheres with a double-shell structure using aberration-corrected scanning confocal electron microscopy. In: Journal of Electron Microscopy. 2012 ; Vol. 61, No. 3. pp. 159-169.
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