Three-dimensional optical sectioning by scanning confocal electron microscopy with a stage-scanning system

Ayako Hashimoto, Masayuki Shimojo, Kazutaka Mitsuishi, Masaki Takeguchi

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

We evaluated the depth resolution of annular dark-field (ADF) scanning confocal electron microscopy (SCEM) with a stage-scanning system by observation of nanoparticles. ADF-SCEM is a three-dimensional (3D) imaging technique that we recently proposed. An ADF-SCEM instrument involves a pinhole aperture before a detector for rejecting electrons from the out-of-focal plane in a specimen and an annular aperture under the specimen for collecting only scattered electrons. The stage-scanning system enables us to directly obtain optical slice images perpendicular and parallel to an optical axis at a desired position. In particular, the parallel slices visualize the elongation of nanoparticles along the optical axis, which depends on the depth resolution. ADF-SCEM effectively reduced the elongation length of the nanoparticles sufficiently to demonstrate depth sectioning, in comparison with scanning transmission electron microscopy and bright-field SCEM. The experimentally obtained length was nearly equal to the theoretically estimated one from the probe size considering the experimental conditions. Furthermore, we applied this ADF-SCEM technique to analysis of the 3D position of catalytic nanoparticles on carbon nanostructures.

Original languageEnglish
Pages (from-to)233-238
Number of pages6
JournalMicroscopy and Microanalysis
Volume16
Issue number3
DOIs
Publication statusPublished - 2010 Jun
Externally publishedYes

Fingerprint

Confocal microscopy
Electron microscopy
Scanning
scanning electron microscopy
scanning
nanoparticles
Nanoparticles
elongation
apertures
Elongation
pinholes
Electrons
imaging techniques
electrons
Nanostructures
transmission electron microscopy
Transmission electron microscopy
Detectors
probes
Imaging techniques

Keywords

  • annular dark-field imaging
  • nanoparticles
  • optical sectioning
  • scanning confocal electron microscopy
  • stage scanning
  • three-dimensional imaging

ASJC Scopus subject areas

  • Instrumentation

Cite this

Three-dimensional optical sectioning by scanning confocal electron microscopy with a stage-scanning system. / Hashimoto, Ayako; Shimojo, Masayuki; Mitsuishi, Kazutaka; Takeguchi, Masaki.

In: Microscopy and Microanalysis, Vol. 16, No. 3, 06.2010, p. 233-238.

Research output: Contribution to journalArticle

Hashimoto, Ayako ; Shimojo, Masayuki ; Mitsuishi, Kazutaka ; Takeguchi, Masaki. / Three-dimensional optical sectioning by scanning confocal electron microscopy with a stage-scanning system. In: Microscopy and Microanalysis. 2010 ; Vol. 16, No. 3. pp. 233-238.
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