Three-dimensional passive elements for compact GaAs MMICs

Makoto Hirano, Yuhki Imai, Ichihiko Toyoda, Kenjiro Nishikawa, Masami Tokumitsu, Kazuyoshi Asai

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)


    Novel three-dimensional structures for passive elements - inductors, capacitors, transmission lines, and air-bridges - have been developed to reduce the area they consume in GaAs MMICs. These structures can be formed with a simple technology by electroplating along the sidewalls of a photoresist. Adopting the new structures, most passive elements in MMICs have been shrunk to less than 1/4 the size of conventional ones.

    Original languageEnglish
    Pages (from-to)961-967
    Number of pages7
    JournalIEICE Transactions on Electronics
    Issue number6
    Publication statusPublished - 1993 Jun 1

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Electrical and Electronic Engineering


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