Three-dimensional recording by femtosecond pulses in dielectrics

Saulius Juodkazis, Toshiaki Kondo, Vygantas Mizeikis, Shigeki Matsuo, Hiroyuki Murata, Hiroaki Misawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

Fabrication and characteristics of two-dimensional (2D) and three-dimensional (3D) periodic structures, recorded in the bulk of SU8 photoresist film by multiple-beam interference is described. Multiple beams (up to nine) were generated by a diffractive beam splitter. Recording was performed by ultrashort laser pulses with temporal width of 140 fs (FVWM) and central wavelength of 800 nm, derived from a Ti:sapphire laser. Intensity-dependent photomodification of the photoresist was due to single-photon as well as multi-photon (two and three) absorption. After the development, the exposed resist films contained free-standing 2D and 3D periodic dielectric structures with unexposed exposed regions removed by the development. Detailed examination of the samples has revealed close resemblance between their structure and the light intensity distributions in the multiple-beam interference fields, expected from the numerical calculations. Quality of the samples recorded by a single-photon absorption was lower than that of that of other samples, in particular due to poor development quality. The microfabrication method used in this work appears to be a suitable for obtaining photonic crystal templates.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsA. Pique, K. Sugioka, P.R. Herman, J. Fieret, F.G. Bachmann, J.J. Dubowski, W. Hoving, K. Washio, D.B. Geohegan, F. Trager, K. Murakami
Pages94-107
Number of pages14
Volume4977
DOIs
Publication statusPublished - 2003
Externally publishedYes
EventPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II - San Jose, CA, United States
Duration: 2003 Jan 272003 Jan 30

Other

OtherPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II
CountryUnited States
CitySan Jose, CA
Period03/1/2703/1/30

Fingerprint

Ultrashort pulses
Photons
recording
Photoresists
photoresists
photons
pulses
interference
Wave interference
Microfabrication
Periodic structures
beam splitters
Photonic crystals
Sapphire
luminous intensity
lasers
sapphire
templates
examination
photonics

Keywords

  • Holographic recording
  • Photonic crystals

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Juodkazis, S., Kondo, T., Mizeikis, V., Matsuo, S., Murata, H., & Misawa, H. (2003). Three-dimensional recording by femtosecond pulses in dielectrics. In A. Pique, K. Sugioka, P. R. Herman, J. Fieret, F. G. Bachmann, J. J. Dubowski, W. Hoving, K. Washio, D. B. Geohegan, F. Trager, ... K. Murakami (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4977, pp. 94-107) https://doi.org/10.1117/12.479405

Three-dimensional recording by femtosecond pulses in dielectrics. / Juodkazis, Saulius; Kondo, Toshiaki; Mizeikis, Vygantas; Matsuo, Shigeki; Murata, Hiroyuki; Misawa, Hiroaki.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / A. Pique; K. Sugioka; P.R. Herman; J. Fieret; F.G. Bachmann; J.J. Dubowski; W. Hoving; K. Washio; D.B. Geohegan; F. Trager; K. Murakami. Vol. 4977 2003. p. 94-107.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Juodkazis, S, Kondo, T, Mizeikis, V, Matsuo, S, Murata, H & Misawa, H 2003, Three-dimensional recording by femtosecond pulses in dielectrics. in A Pique, K Sugioka, PR Herman, J Fieret, FG Bachmann, JJ Dubowski, W Hoving, K Washio, DB Geohegan, F Trager & K Murakami (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4977, pp. 94-107, PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II, San Jose, CA, United States, 03/1/27. https://doi.org/10.1117/12.479405
Juodkazis S, Kondo T, Mizeikis V, Matsuo S, Murata H, Misawa H. Three-dimensional recording by femtosecond pulses in dielectrics. In Pique A, Sugioka K, Herman PR, Fieret J, Bachmann FG, Dubowski JJ, Hoving W, Washio K, Geohegan DB, Trager F, Murakami K, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4977. 2003. p. 94-107 https://doi.org/10.1117/12.479405
Juodkazis, Saulius ; Kondo, Toshiaki ; Mizeikis, Vygantas ; Matsuo, Shigeki ; Murata, Hiroyuki ; Misawa, Hiroaki. / Three-dimensional recording by femtosecond pulses in dielectrics. Proceedings of SPIE - The International Society for Optical Engineering. editor / A. Pique ; K. Sugioka ; P.R. Herman ; J. Fieret ; F.G. Bachmann ; J.J. Dubowski ; W. Hoving ; K. Washio ; D.B. Geohegan ; F. Trager ; K. Murakami. Vol. 4977 2003. pp. 94-107
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