Abstract
The use of laser lithography in the fabrication of large-scale, three-dimensional (3D) photonic crystals was discussed. Lithography by direct laser writing (DLW) allows recording of nearly arbitrary 3D lattices with submicrometric resolution. Self-supporting structure obtained in the SU-8 photoresist stop gaps at infrared wavelength. The samples obtained are structurally strong, sustain extended defects, and exhibit photonic stop-gaps in the infrared wavelength range of 2.0-6.0 μm.
Original language | English |
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Pages (from-to) | 541-545 |
Number of pages | 5 |
Journal | Advanced Materials |
Volume | 17 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2005 Mar 8 |
Externally published | Yes |
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering