Ti-Al, graded Al/AlTi, and Ti-Al-N coatings prepared by supersonic Free-Jet PVD

Atsushi Yumoto, Takahisa Yamamoto, Fujio Hiroki, Ichiro Shiota, Naotake Niwa

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


The authors previously developed Supersonic Free-Jet PVD (SFJ-PVD) as a new coating method in which a coating film is formed by depositing nanoparticles at very high velocity onto a substrate. This SFJ-PVD provides a rapid deposition rate and produces a mixture of different kinds of nanoparticles formed in different evaporation chambers on the substrate. This paper describes the preparation of graded Al/ AlTi, Ti-Al, and Ti-Al-N coating films with SFJ-PVD. Ti-50 at%Al film and graded Al/AlTi film are produced by depositing Al and Ti nanoparticles formed in different evaporation chambers with the controlled evaporation rates of Al and Ti. Ti-Al-N film is produced by depositing nanoparticles formed in the evaporation chamber with a controlled partial pressure of N2 in an atmosphere of He. Mixing Ti and Al nanoparticles by depositing them onto a substrate produces in-situ syntheses of γ-TiAl and α-Ti3Al intermetallic compounds on the substrate regardless of the substrate temperature in these experimental conditions. A smooth, compact, and defect-free structure is formed both at the interface between the substrate and the coating films and inside the coating films. XRD analysis reveals the crystal structure of the Ti-Al-N film to be TiN, Ti 3Al2N2, Ti3AlN, and AlN.

Original languageEnglish
Pages (from-to)1620-1623
Number of pages4
JournalMaterials Transactions
Issue number5
Publication statusPublished - 2004 May
Externally publishedYes


  • Functionally graded material
  • Nanoparticle
  • Supersonic gas flow
  • Titanium-aluminides
  • Titanium-aluminum-nitrides

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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