Tool Difference Transition Visualization for Semiconductor Manufacturing

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	187-192
Journal	The Society of Instrument and Control Engineers (SICE) Journal of Control, Measurement, and System Integration
Volume	3
Publication status	Published - 2010 May 31

Cite this

@article{c959e49978d64cf7b62b43d1472661ca,

title = "Tool Difference Transition Visualization for Semiconductor Manufacturing",

author = "T. Kubo and Homma, {T. Kubo;M.Minami;T.}",

year = "2010",

month = may,

day = "31",

language = "English",

volume = "3",

pages = "187--192",

journal = "The Society of Instrument and Control Engineers (SICE) Journal of Control, Measurement, and System Integration",

}

TY - JOUR

T1 - Tool Difference Transition Visualization for Semiconductor Manufacturing

AU - Kubo, T.

AU - Homma, T. Kubo;M.Minami;T.

PY - 2010/5/31

Y1 - 2010/5/31

M3 - Article

VL - 3

SP - 187

EP - 192

JO - The Society of Instrument and Control Engineers (SICE) Journal of Control, Measurement, and System Integration

JF - The Society of Instrument and Control Engineers (SICE) Journal of Control, Measurement, and System Integration

ER -