Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

Hokuto Yamane; Sumito Nagasawa

doi:10.1109/MEMSYS.2015.7050950

Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper we propose a trajectory control method for a MEMS falling object as shown in Figure 1. The MEMS falling object is consisted of two units, an autorotation part and a non-rotation part. The autorotation part keeps its attitude stable with the gyro-effect of the autorotation phenomenon. The non-rotation part keeps a non-rotation state by using the air breaking boards. This non-rotation part controls its falling trajectory and the scattering region. By using large falling objects, aerodynamics of the falling object was characterized, e.g. falling speed, rotational speed, etc. Then the MEMS falling object was designed considering with this aerodynamics. The MEMS falling object was fabricated with a method of the SU-8 multi-layer structure. A MEMS autorotation part whose wing length is 6mm in diameter rotates at 4,800 rpm in the wind-tunnel successfully.

Original language	English
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	308-311
Number of pages	4
Volume	2015-February
Edition	February
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050950
Publication status	Published - 2015 Feb 26
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

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10.1109/MEMSYS.2015.7050950

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Cite this

Yamane, H., & Nagasawa, S. (2015). Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (February ed., Vol. 2015-February, pp. 308-311). [7050950] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050950

Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. / Yamane, Hokuto; Nagasawa, Sumito.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2015-February February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 308-311 7050950.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamane, H & Nagasawa, S 2015, Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). February edn, vol. 2015-February, 7050950, Institute of Electrical and Electronics Engineers Inc., pp. 308-311, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7050950

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