Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

Hokuto Yamane; Sumito Nagasawa

doi:10.1109/MEMSYS.2015.7050950

Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper we propose a trajectory control method for a MEMS falling object as shown in Figure 1. The MEMS falling object is consisted of two units, an autorotation part and a non-rotation part. The autorotation part keeps its attitude stable with the gyro-effect of the autorotation phenomenon. The non-rotation part keeps a non-rotation state by using the air breaking boards. This non-rotation part controls its falling trajectory and the scattering region. By using large falling objects, aerodynamics of the falling object was characterized, e.g. falling speed, rotational speed, etc. Then the MEMS falling object was designed considering with this aerodynamics. The MEMS falling object was fabricated with a method of the SU-8 multi-layer structure. A MEMS autorotation part whose wing length is 6mm in diameter rotates at 4,800 rpm in the wind-tunnel successfully.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	308-311
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050950
Publication status	Published - 2015 Feb 26
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2015.7050950

Cite this

Yamane, H., & Nagasawa, S. (2015). Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 308-311). [7050950] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050950

Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. / Yamane, Hokuto; Nagasawa, Sumito.

2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 308-311 7050950 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamane, H & Nagasawa, S 2015, Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7050950, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 308-311, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7050950

Yamane H, Nagasawa S. Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 308-311. 7050950. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7050950

Yamane, Hokuto ; Nagasawa, Sumito. / Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 308-311 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

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