Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

Hokuto Yamane, Sumito Nagasawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we propose a trajectory control method for a MEMS falling object as shown in Figure 1. The MEMS falling object is consisted of two units, an autorotation part and a non-rotation part. The autorotation part keeps its attitude stable with the gyro-effect of the autorotation phenomenon. The non-rotation part keeps a non-rotation state by using the air breaking boards. This non-rotation part controls its falling trajectory and the scattering region. By using large falling objects, aerodynamics of the falling object was characterized, e.g. falling speed, rotational speed, etc. Then the MEMS falling object was designed considering with this aerodynamics. The MEMS falling object was fabricated with a method of the SU-8 multi-layer structure. A MEMS autorotation part whose wing length is 6mm in diameter rotates at 4,800 rpm in the wind-tunnel successfully.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages308-311
Number of pages4
Volume2015-February
EditionFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
CountryPortugal
CityEstoril
Period15/1/1815/1/22

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Yamane, H., & Nagasawa, S. (2015). Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (February ed., Vol. 2015-February, pp. 308-311). [7050950] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050950