Trends of Interlayer Dielectric Film Technologies in Ultra-Large-Scale Integrated Circuits (ULSIs)

T.Homma T.Homma, Tetsuya Homma

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 1997 Nov 21

Cite this

Trends of Interlayer Dielectric Film Technologies in Ultra-Large-Scale Integrated Circuits (ULSIs). / T.Homma, T.Homma; Homma, Tetsuya.

In: Default journal, 21.11.1997.

Research output: Contribution to journalArticle

@article{874bf3c9672940978e382cd41edd16df,
title = "Trends of Interlayer Dielectric Film Technologies in Ultra-Large-Scale Integrated Circuits (ULSIs)",
author = "T.Homma T.Homma and Tetsuya Homma",
year = "1997",
month = "11",
day = "21",
language = "English",
journal = "Default journal",

}

TY - JOUR

T1 - Trends of Interlayer Dielectric Film Technologies in Ultra-Large-Scale Integrated Circuits (ULSIs)

AU - T.Homma, T.Homma

AU - Homma, Tetsuya

PY - 1997/11/21

Y1 - 1997/11/21

M3 - Article

JO - Default journal

JF - Default journal

ER -