Tribological properties of physical vapor deposited ZrN thin films

Atsushi Mitsuo, Tatsuhiko Aizawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Zirconium nitride thin films were prepared by ion-beam assisted deposition (IBAD) on silicon substrates. The films were synthesized by depositing zirconium vapor simultaneous irradiation with nitrogen ions. Transport ratio of Zr to N was varied between 1.0 and 3.0, and N-ion beam energy was kept 0.5 and 1.0 keV. The films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Hardness of the films was investigated with a nano-indentation tester. The films were tested for friction and wear on a ball-and-disk tribometer, under 5 N load and 10 mm/s relative sliding speed with steel balls as the counter material. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films were compared with post chlorine-ion implanted films.

Original languageEnglish
Title of host publicationInternational Surface Engineering Congress - Proceedings of the 1st Congress
Pages127-130
Number of pages4
Publication statusPublished - 2003
Externally publishedYes
EventInternational Surface Engineering Congress - Proceedings of the 1st Congress - Colombus, OH
Duration: 2002 Oct 72002 Oct 10

Other

OtherInternational Surface Engineering Congress - Proceedings of the 1st Congress
CityColombus, OH
Period02/10/702/10/10

Fingerprint

Vapors
Thin films
Zirconium
Hardness
Ion beam assisted deposition
Ions
Nanoindentation
Nitrides
Chlorine
Ion beams
X ray photoelectron spectroscopy
Wear of materials
Irradiation
Friction
Nitrogen
X ray diffraction
Silicon
Steel
Substrates

Keywords

  • Chlorine ion implantation
  • Friction coefficient
  • Hardness
  • Ion beam assisted deposition
  • Zirconium nitride

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Mitsuo, A., & Aizawa, T. (2003). Tribological properties of physical vapor deposited ZrN thin films. In International Surface Engineering Congress - Proceedings of the 1st Congress (pp. 127-130)

Tribological properties of physical vapor deposited ZrN thin films. / Mitsuo, Atsushi; Aizawa, Tatsuhiko.

International Surface Engineering Congress - Proceedings of the 1st Congress. 2003. p. 127-130.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mitsuo, A & Aizawa, T 2003, Tribological properties of physical vapor deposited ZrN thin films. in International Surface Engineering Congress - Proceedings of the 1st Congress. pp. 127-130, International Surface Engineering Congress - Proceedings of the 1st Congress, Colombus, OH, 02/10/7.
Mitsuo A, Aizawa T. Tribological properties of physical vapor deposited ZrN thin films. In International Surface Engineering Congress - Proceedings of the 1st Congress. 2003. p. 127-130
Mitsuo, Atsushi ; Aizawa, Tatsuhiko. / Tribological properties of physical vapor deposited ZrN thin films. International Surface Engineering Congress - Proceedings of the 1st Congress. 2003. pp. 127-130
@inproceedings{9542556596e84bb48d38442ffd1dd2f3,
title = "Tribological properties of physical vapor deposited ZrN thin films",
abstract = "Zirconium nitride thin films were prepared by ion-beam assisted deposition (IBAD) on silicon substrates. The films were synthesized by depositing zirconium vapor simultaneous irradiation with nitrogen ions. Transport ratio of Zr to N was varied between 1.0 and 3.0, and N-ion beam energy was kept 0.5 and 1.0 keV. The films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Hardness of the films was investigated with a nano-indentation tester. The films were tested for friction and wear on a ball-and-disk tribometer, under 5 N load and 10 mm/s relative sliding speed with steel balls as the counter material. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films were compared with post chlorine-ion implanted films.",
keywords = "Chlorine ion implantation, Friction coefficient, Hardness, Ion beam assisted deposition, Zirconium nitride",
author = "Atsushi Mitsuo and Tatsuhiko Aizawa",
year = "2003",
language = "English",
isbn = "0871707810",
pages = "127--130",
booktitle = "International Surface Engineering Congress - Proceedings of the 1st Congress",

}

TY - GEN

T1 - Tribological properties of physical vapor deposited ZrN thin films

AU - Mitsuo, Atsushi

AU - Aizawa, Tatsuhiko

PY - 2003

Y1 - 2003

N2 - Zirconium nitride thin films were prepared by ion-beam assisted deposition (IBAD) on silicon substrates. The films were synthesized by depositing zirconium vapor simultaneous irradiation with nitrogen ions. Transport ratio of Zr to N was varied between 1.0 and 3.0, and N-ion beam energy was kept 0.5 and 1.0 keV. The films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Hardness of the films was investigated with a nano-indentation tester. The films were tested for friction and wear on a ball-and-disk tribometer, under 5 N load and 10 mm/s relative sliding speed with steel balls as the counter material. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films were compared with post chlorine-ion implanted films.

AB - Zirconium nitride thin films were prepared by ion-beam assisted deposition (IBAD) on silicon substrates. The films were synthesized by depositing zirconium vapor simultaneous irradiation with nitrogen ions. Transport ratio of Zr to N was varied between 1.0 and 3.0, and N-ion beam energy was kept 0.5 and 1.0 keV. The films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Hardness of the films was investigated with a nano-indentation tester. The films were tested for friction and wear on a ball-and-disk tribometer, under 5 N load and 10 mm/s relative sliding speed with steel balls as the counter material. The hardness of the films increased with decreasing the transport ratio. Tribological properties of films were compared with post chlorine-ion implanted films.

KW - Chlorine ion implantation

KW - Friction coefficient

KW - Hardness

KW - Ion beam assisted deposition

KW - Zirconium nitride

UR - http://www.scopus.com/inward/record.url?scp=11044221500&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=11044221500&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0871707810

SN - 9780871707819

SP - 127

EP - 130

BT - International Surface Engineering Congress - Proceedings of the 1st Congress

ER -