Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, M. Shimojo, M. Han, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

49 Citations (Scopus)


We have successfully fabricated nano-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)6 is ∼1.5 nm in diameter, which is close to the theoretical resolution limit.

Original languageEnglish
Pages (from-to)261-264
Number of pages4
JournalSurface and Interface Analysis
Issue number2
Publication statusPublished - 2005 Feb 1



  • Electron beam
  • Induced deposition (EBID)
  • Nano-dot
  • STEM
  • TEM
  • W(CO)

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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