Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka; M. Shimojo; M. Han; K. Mitsuishi; K. Furuya

doi:10.1002/sia.1978

Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, M. Shimojo, M. Han, K. Mitsuishi, K. Furuya

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

We have successfully fabricated nano-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)₆ is ∼1.5 nm in diameter, which is close to the theoretical resolution limit.

Original language	English
Pages (from-to)	261-264
Number of pages	4
Journal	Surface and Interface Analysis
Volume	37
Issue number	2
DOIs	https://doi.org/10.1002/sia.1978
Publication status	Published - 2005 Feb 1
Externally published	Yes

Keywords

Electron beam
Induced deposition (EBID)
Nano-dot
STEM
TEM
W(CO)

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Access to Document

10.1002/sia.1978

Cite this

@article{07ab082867384db0943fd321553bc5b1,

title = "Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope",

abstract = "We have successfully fabricated nano-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)6 is ∼1.5 nm in diameter, which is close to the theoretical resolution limit.",

keywords = "Electron beam, Induced deposition (EBID), Nano-dot, STEM, TEM, W(CO)",

author = "M. Tanaka and M. Shimojo and M. Han and K. Mitsuishi and K. Furuya",

year = "2005",

month = feb,

day = "1",

doi = "10.1002/sia.1978",

language = "English",

volume = "37",

pages = "261--264",

journal = "Surface and Interface Analysis",

issn = "0142-2421",

publisher = "John Wiley and Sons Ltd",

number = "2",

}

TY - JOUR

T1 - Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

AU - Tanaka, M.

AU - Shimojo, M.

AU - Han, M.

AU - Mitsuishi, K.

AU - Furuya, K.

PY - 2005/2/1

Y1 - 2005/2/1

N2 - We have successfully fabricated nano-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)6 is ∼1.5 nm in diameter, which is close to the theoretical resolution limit.

AB - We have successfully fabricated nano-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)6 is ∼1.5 nm in diameter, which is close to the theoretical resolution limit.

KW - Electron beam

KW - Induced deposition (EBID)

KW - Nano-dot

KW - STEM

KW - TEM

KW - W(CO)

UR - http://www.scopus.com/inward/record.url?scp=13244291557&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=13244291557&partnerID=8YFLogxK

U2 - 10.1002/sia.1978

DO - 10.1002/sia.1978

M3 - Article

AN - SCOPUS:13244291557

SN - 0142-2421

VL - 37

SP - 261

EP - 264

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

IS - 2

ER -

Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this