Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, Masayuki Shimojo, M. Han, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

47 Citations (Scopus)

Abstract

We have successfully fabricated nano-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)6 is ∼1.5 nm in diameter, which is close to the theoretical resolution limit.

Original languageEnglish
Pages (from-to)261-264
Number of pages4
JournalSurface and Interface Analysis
Volume37
Issue number2
DOIs
Publication statusPublished - 2005 Feb
Externally publishedYes

Fingerprint

Tungsten
Ultrahigh vacuum
Gold
Partial pressure
ultrahigh vacuum
Electron beams
Electron microscopes
electron microscopes
Gases
Metals
Particle size
Irradiation
electron beams
partial pressure
tungsten
gold
irradiation
gases
metals
hexacarbonyltungsten

Keywords

  • Electron beam
  • Induced deposition (EBID)
  • Nano-dot
  • STEM
  • TEM
  • W(CO)

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Colloid and Surface Chemistry

Cite this

Ultimate sized nano-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope. / Tanaka, M.; Shimojo, Masayuki; Han, M.; Mitsuishi, K.; Furuya, K.

In: Surface and Interface Analysis, Vol. 37, No. 2, 02.2005, p. 261-264.

Research output: Contribution to journalArticle

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