Ultra-low resistance Cu vias

K.Ueno K.Ueno, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Cite this

@article{0a59517cba5a488faf7bab95c8ea9140,
title = "Ultra-low resistance Cu vias",
author = "K.Ueno K.Ueno and Kazuyoshi Ueno",
year = "1998",
month = "10",
day = "5",
language = "English",
journal = "Advanced Metallization for ULSI Applications in 1998,Tutorial,Future Research Seminar",

}

TY - JOUR

T1 - Ultra-low resistance Cu vias

AU - K.Ueno, K.Ueno

AU - Ueno, Kazuyoshi

PY - 1998/10/5

Y1 - 1998/10/5

M3 - Article

JO - Advanced Metallization for ULSI Applications in 1998,Tutorial,Future Research Seminar

JF - Advanced Metallization for ULSI Applications in 1998,Tutorial,Future Research Seminar

ER -