| Original language | English |
|---|---|
| Journal | Ａｄｖａｎｃｅｄ Ｍｅｔａｌｌｉｚａｔｉｏｎ for ULSI Applications in 1998,Tutorial,Future Research Seminar |
| Publication status | Published - 1998 Oct 5 |
Ultra-low resistance Cu vias
K.Ueno K.Ueno, Kazuyoshi Ueno
Research output: Contribution to journal › Article › peer-review