Ultralow impedance evaluation system of wideband frequency for power distribution network of decoupling capacitor embedded substrates

Katsuya Kikuchi, Koichi Takemura, Chihiro Ueda, Osamu Shimada, Toshio Gomyo, Yukiharu Takeuchi, Toshikazu Okubo, Kazuhiro Baba, Masahiro Aoyagi, Toshio Sudo, Kanji Otsuka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed an impedance analyzer system with a wide frequency range for evaluating ultralow impedance. The four-point impedance measurement technique is introduced using this system. This impedance measurement can be reliably and accurately carried out by a four-point technique where one pair of contacts is used to inject a signal into the device under test (DUT), and a second pair of contacts is used to sense the resulting signal across the DUT. As a result, an evaluation system for the tens of micro-ohms of trans-impedance Z21 in the frequency range of 10 Hz to 40 GHz can be realized. By using two microwave contact probes, PDN impedance evaluation with contacted pads is realized. Therefore, the PDN impedance can be measured directly without the connectors during the measurement. Moreover, it is expected that the accurate and wideband impedance evaluation of a substrate with an electromagnetic band gap (EBG) structure can be realized.

Original languageEnglish
Title of host publication2009 IEEE International Conference on 3D System Integration, 3DIC 2009
DOIs
Publication statusPublished - 2009 Dec 1
Event2009 IEEE International Conference on 3D System Integration, 3DIC 2009 - San Francisco, CA, United States
Duration: 2009 Sep 282009 Sep 30

Publication series

Name2009 IEEE International Conference on 3D System Integration, 3DIC 2009

Conference

Conference2009 IEEE International Conference on 3D System Integration, 3DIC 2009
CountryUnited States
CitySan Francisco, CA
Period09/9/2809/9/30

    Fingerprint

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Kikuchi, K., Takemura, K., Ueda, C., Shimada, O., Gomyo, T., Takeuchi, Y., Okubo, T., Baba, K., Aoyagi, M., Sudo, T., & Otsuka, K. (2009). Ultralow impedance evaluation system of wideband frequency for power distribution network of decoupling capacitor embedded substrates. In 2009 IEEE International Conference on 3D System Integration, 3DIC 2009 [5306526] (2009 IEEE International Conference on 3D System Integration, 3DIC 2009). https://doi.org/10.1109/3DIC.2009.5306526