Original language | English |
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Pages (from-to) | 390-391 |
Journal | Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium |
Publication status | Published - 2010 Mar 24 |
VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES
N.T.Phi N.T.Phi, R.Teshima R.Teshima, T.Hasegawa T.Hasegawa, H.Nishikawa H.Nishikawa, Tadahiro Hasegawa
Research output: Contribution to journal › Article › peer-review