VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES

N.T.Phi N.T.Phi, R.Teshima R.Teshima, T.Hasegawa T.Hasegawa, H.Nishikawa H.Nishikawa, Tadahiro Hasegawa

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	390-391
Journal	Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium
Publication status	Published - 2010 Mar 24

Cite this

@article{19f022b0da4a45c9a1d123701c079d25,

title = "VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES",

author = "N.T.Phi N.T.Phi and R.Teshima R.Teshima and T.Hasegawa T.Hasegawa and H.Nishikawa H.Nishikawa and Tadahiro Hasegawa",

year = "2010",

month = mar,

day = "24",

language = "English",

pages = "390--391",

journal = "Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium",

}

TY - JOUR

T1 - VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES

AU - N.T.Phi, N.T.Phi

AU - R.Teshima, R.Teshima

AU - T.Hasegawa, T.Hasegawa

AU - H.Nishikawa, H.Nishikawa

AU - Hasegawa, Tadahiro

PY - 2010/3/24

Y1 - 2010/3/24

M3 - Article

SP - 390

EP - 391

JO - Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium

JF - Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium

ER -