VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES

N.T.Phi N.T.Phi, R.Teshima R.Teshima, T.Hasegawa T.Hasegawa, H.Nishikawa H.Nishikawa, Tadahiro Hasegawa

Research output: Contribution to journal › Article

Original languageEnglish
Pages (from-to)390-391
JournalProceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium
Publication statusPublished - 2010 Mar 24

Cite this

VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES. / N.T.Phi, N.T.Phi; R.Teshima, R.Teshima; T.Hasegawa, T.Hasegawa; H.Nishikawa, H.Nishikawa; Hasegawa, Tadahiro.

In: Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium, 24.03.2010, p. 390-391.

Research output: Contribution to journal › Article

N.T.Phi, NTP, R.Teshima, RT, T.Hasegawa, TH, H.Nishikawa, HN & Hasegawa, T 2010, 'VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES', Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium, pp. 390-391.
N.T.Phi NTP, R.Teshima RT, T.Hasegawa TH, H.Nishikawa HN, Hasegawa T. VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES. Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium. 2010 Mar 24;390-391.
N.T.Phi, N.T.Phi ; R.Teshima, R.Teshima ; T.Hasegawa, T.Hasegawa ; H.Nishikawa, H.Nishikawa ; Hasegawa, Tadahiro. / VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES. In: Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium. 2010 ; pp. 390-391.
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