VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES

N.T.Phi N.T.Phi, R.Teshima R.Teshima, T.Hasegawa T.Hasegawa, H.Nishikawa H.Nishikawa, Tadahiro Hasegawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)390-391
JournalProceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium
Publication statusPublished - 2010 Mar 24

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