VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES

N.T.Phi N.T.Phi, R.Teshima R.Teshima, T.Hasegawa T.Hasegawa, H.Nishikawa H.Nishikawa, Tadahiro Hasegawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)390-391
JournalProceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium
Publication statusPublished - 2010 Mar 24

Cite this

VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES. / N.T.Phi, N.T.Phi; R.Teshima, R.Teshima; T.Hasegawa, T.Hasegawa; H.Nishikawa, H.Nishikawa; Hasegawa, Tadahiro.

In: Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium, 24.03.2010, p. 390-391.

Research output: Contribution to journalArticle

N.T.Phi, N.T.Phi ; R.Teshima, R.Teshima ; T.Hasegawa, T.Hasegawa ; H.Nishikawa, H.Nishikawa ; Hasegawa, Tadahiro. / VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES. In: Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium. 2010 ; pp. 390-391.
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