Versatile proton beam writing system with stage movement

Phi T. Nguyen, Nobukazu Kawakami, Tadahiro Hasegawa, Hiroyuki Nishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose a Proton beam writing (PBW) system with an auto scanning program and stage movement in order to entirely solve the narrow scanning and low design problems of PBW technique. We developed the auto scanning program to transform from 3D CAD (Computer Aided Design) data to scanning pattern data which enables to pattern the complex structures more accurate and much faster. On the other hand, we combined the XY-stage control and electrostatic scanning to expand the fabrication area of our previous system from micrometers range to centimeters range which able to fabricate the whole microstructures network by one exposing time. Our PBW system provides a versatile tool with the unique advantages of proton beam for 3D machining, particularly useful for high-aspect ratio and complicated microstructures.

Original languageEnglish
Title of host publicationNANOMED 2012 - 6th IEEE International Conference on Nano/Molecular Medicine and Engineering
Pages51-55
Number of pages5
DOIs
Publication statusPublished - 2012 Dec 1
Event6th IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2012 - Bangkok, Thailand
Duration: 2012 Nov 42012 Nov 7

Publication series

NameIEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED
ISSN (Print)2159-6964
ISSN (Electronic)2159-6972

Conference

Conference6th IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2012
CountryThailand
CityBangkok
Period12/11/412/11/7

    Fingerprint

Keywords

  • Auto scanning pattern
  • Key words
  • Micro fabrication
  • Proton beam writing
  • STL format
  • XY stage movement

ASJC Scopus subject areas

  • Molecular Medicine
  • Biomedical Engineering
  • Microbiology (medical)

Cite this

Nguyen, P. T., Kawakami, N., Hasegawa, T., & Nishikawa, H. (2012). Versatile proton beam writing system with stage movement. In NANOMED 2012 - 6th IEEE International Conference on Nano/Molecular Medicine and Engineering (pp. 51-55). [6509122] (IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED). https://doi.org/10.1109/NANOMED.2012.6509122