Vibration based energy harvester employing ZnO film on the stainless steel substrate

Shota Hosokawa, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We developed the energy harvester employing piezoelectric zinc oxide (ZnO) thin film for application to large vibrational amplitude. To ensure the fracture toughness, stainless steel (SUS304) was employed as a substrate. Also, to prevent the electrical breakdown due to the pinholes in the ZnO film, conformal silicon oxide (SiO2) layer was inserted between the ZnO film and top electrode. By inserting the SiO2 layer, power efficiency was much enhanced. As a result, a generated power of 150 nW was obtained when acceleration and load resistance were 0.7 m/s2 and 670 k, respectively.

Original languageEnglish
Pages (from-to)126-127
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume133
Issue number4
DOIs
Publication statusPublished - 2013
Externally publishedYes

Keywords

  • Energy harvester
  • Stainless
  • ZnO

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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