VO2 thin films deposited on ZnO buffer layer

Jian Wei Ma, Ya Rui Song, Gang Xu, Lei Miao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Vanadium oxide thin films have been deposited on glass and ZnO-coated glass substrates by reactive RF-magnetron sputtering deposition at different substrate temperature. The introduction of ZnO buffer layer could increase the transmittance. The buffer layer ZnO could lead to the increase of the crystallinity quality of VO2 films and substrate temperature could be decreased to 100°C for the obtaining of polycrystalline VO2 structure. The structure of VO2/ZnO/glass is considered to be potentially applicable to "smart windows" of high total energy efficiency in architectures or automobiles.

Original languageEnglish
Title of host publicationResources and Sustainable Development
Pages2568-2571
Number of pages4
DOIs
Publication statusPublished - 2013
Externally publishedYes
Event2013 2nd International Conference on Energy and Environmental Protection, ICEEP 2013 - Guilin, China
Duration: 2013 Apr 192013 Apr 21

Publication series

NameAdvanced Materials Research
Volume734-737
ISSN (Print)1022-6680

Conference

Conference2013 2nd International Conference on Energy and Environmental Protection, ICEEP 2013
CountryChina
CityGuilin
Period13/4/1913/4/21

Keywords

  • RF-magnetron sputtering
  • Smart windows
  • Thermochromic materials
  • TiO
  • VO

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Ma, J. W., Song, Y. R., Xu, G., & Miao, L. (2013). VO2 thin films deposited on ZnO buffer layer. In Resources and Sustainable Development (pp. 2568-2571). (Advanced Materials Research; Vol. 734-737). https://doi.org/10.4028/www.scientific.net/AMR.734-737.2568