W-doped anatase TiO2 transparent conductive oxide films: Theory and experiment

De Ming Chen, Gang Xu, Lei Miao, Li Hua Chen, Setsuo Nakao, Ping Jin

Research output: Contribution to journalArticle

49 Citations (Scopus)

Abstract

W-doped anatase TiO2 films were deposited on glass substrate by magnetron cosputtering. The minimum resistivity, 1.5× 10 -2ω cm, for Ti1-x Wx O2 film (x=0.063) was obtained. X-ray photoelectron spectroscopy analysis shows W incorporated in the Ti lattice position is mostly in the W6+ state. Theoretical calculations based upon the density-functional theory were applied to analyze the electronic structure and conducting mechanism. The strong hybridization of Ti 3d states with W 5d states is the dominate factor to cause the shifting in Fermi level into conduction band. Our results suggest that tungsten is a favorable dopant to form TiO2 -based transparent conducting oxide materials.

Original languageEnglish
Article number063707
JournalJournal of Applied Physics
Volume107
Issue number6
DOIs
Publication statusPublished - 2010

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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