What is the essence of vFB shifts in high-k gate stack?

Toshihide Nabatame, Kunihiko Iwamoto, Koji Akiyama, Yu Nunoshige, Hiroyuki Ota, Tomoji Ohishi, Akira Toriumi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

14 Citations (Scopus)

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Engineering & Materials Science