Xenon flash lamp annealing of poly-Si thin films

Fujio Terai, Shigeki Matunaka, Akihiko Tauchi, Chikako Ichimura, Takao Nagatomo, Tetsuya Homma

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds