Yokoi, H.,
Yumoto, A., Hasegawa, H. & Matsuzaki, S.,
2020 4 1,
237th ECS Meeting: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 10. Jagannathan, H., Kakushima, K., Timans, P. J., Gusev, E., Karim, Z., De Gendt, S., Misra, D., Obeng, Y. S. & Roo, F. (eds.).
3 ed. Institute of Physics Publishing,
p. 31-36 6 p. (ECS Transactions; vol. 97, no. 3).
研究成果: Conference contribution