• 6656 引用
  • 42 h指数
19922017
Pureに変更を加えた場合、すぐここに表示されます。

研究成果 1992 2017

  • 6656 引用
  • 42 h指数
  • 139 Article
  • 38 Conference contribution
  • 2 Chapter
  • 1 Review article
フィルター
Conference contribution
2013

Breakdown voltage in silicon carbide metal-oxide-semiconductor devices induced by ion beams

Ohshima, T., Deki, M., Makino, T., Iwamoto, N., Onoda, S., Hirao, T., Kojima, K., Tomita, T., Matsuo, S. & Hashimoto, S., 2013, AIP Conference Proceedings. 巻 1525. p. 654-658 5 p.

研究成果: Conference contribution

ion irradiation
semiconductor devices
electrical faults
metal oxide semiconductors
silicon carbides

Observation of quill effect induced by distortion of spatial beam profile

Matsuo, S., Umeda, K. E. Y. & Hashimoto, S., 2013, MATEC Web of Conferences. EDP Sciences, 巻 8. 01006

研究成果: Conference contribution

Etching
Ultrashort pulses
Silicon Dioxide
Silica
Scanning

Three-dimensional micro modification and selective etching of crystalline silicon using 1.56-μm subpicosecond laser pulses

Matsuo, S., Oda, K. & Naoi, Y., 2013, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 6600555

研究成果: Conference contribution

Silicon
Etching
Laser pulses
etching
Hydrofluoric Acid
2012
4 引用 (Scopus)

Formation of nanovoids in femtosecond laser-irradiated single crystals of silicon carbide

Okada, T., Tomita, T., Matsuo, S., Hashimoto, S., Kashino, R. & Ito, T., 2012, Materials Science Forum. 巻 725. p. 19-22 4 p. (Materials Science Forum; 巻数 725).

研究成果: Conference contribution

Ultrashort pulses
Silicon carbide
silicon carbides
Single crystals
Lasers
2011

Femtosecond laser modification aiming at the enhancement of local electric conductivities in SiC

Deki, M., Yamamoto, M., Ito, T., Tomita, T., Matsuo, S., Hashimoto, S., Kitada, T., Isu, T., Onoda, S. & Ohshima, T., 2011, AIP Conference Proceedings. 巻 1399. p. 119-120 2 p.

研究成果: Conference contribution

silicon carbides
conductivity
augmentation
lasers
electrical resistivity

Rotation formulas in the jones calculus extended to axially symmetrically polarized beam

Matsuo, S., 2011, Optics InfoBase Conference Papers.

研究成果: Conference contribution

calculus
Polarization
Optical devices
polarization
cross sections
2010
3 引用 (Scopus)

Electronic properties of femtosecond laser induced modified spots on single crystal silicon carbide

Tomita, T., Iwami, M., Yamamoto, M., Deki, M., Matsuo, S., Hashimoto, S., Nakagawa, Y., Kitada, T., Isu, T., Saito, S., Sakai, K., Onoda, S. & Ohshima, T., 2010, Materials Science Forum. Trans Tech Publications Ltd, 巻 645-648. p. 239-242 4 p. (Materials Science Forum; 巻数 645-648).

研究成果: Conference contribution

Ultrashort pulses
Silicon carbide
silicon carbides
Electronic properties
Single crystals
2009

Laser internal modification plus wet etching for micro-structuring crystalline and glassy materials

Matsuo, S., 2009, ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. 巻 102. p. 942-945 4 p.

研究成果: Conference contribution

Wet etching
Ultrashort pulses
Descaling
Crystalline materials
Lasers
2007
6 引用 (Scopus)

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Tanaka, S. & Misawa, H., 2007, Proceedings of SPIE - The International Society for Optical Engineering. 巻 6732. 67320B

研究成果: Conference contribution

Microfabrication
ripples
Semiconductor materials
Lasers
Metals
2006
4 引用 (Scopus)

Structures of cornets in a homoepitaxially grown 4H-SiC film studied by DUV micro-Raman spectroscopy

Tomita, T., Matsuo, S., Okada, T., Kimoto, T., Mitani, T. & Nakashima, S. I., 2006, Materials Science Forum. PART 1 版 巻 527-529. p. 339-342 4 p. (Materials Science Forum; 巻数 527-529, 番号 PART 1).

研究成果: Conference contribution

Raman spectroscopy
Surface defects
Raman scattering
Defects
Microstructure
2005
9 引用 (Scopus)

Anisotropic etching of dielectrics exposed by high intensity femtosecond pulses

Juodkazis, S., Tabuchi, Y., Ebisui, T., Matsuo, S. & Misawa, H., 2005, Proceedings of SPIE - The International Society for Optical Engineering. Shcherbakov, I. A., Giardini, A., Konov, V. I. & Pustovoy, V. I. (版). 巻 5850. p. 59-66 8 p. 08

研究成果: Conference contribution

Anisotropic etching
Wet etching
Ultrashort pulses
Sapphire
etching
1 引用 (Scopus)

Laser micro fabrication of photoresist rod array using a microlens array

Matsuo, S., Miyamoto, T. & Tomita, T., 2005, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 巻 2005. p. 1731-1732 2 p. 1569869

研究成果: Conference contribution

photoresists
aspect ratio
rods
fabrication
lasers
1 引用 (Scopus)

Surface structures of femtosecond laser irradiated 4H-SiC crystal

Tomita, T., Kinoshita, K. & Matsuo, S., 2005, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 巻 2005. p. 1744-1745 2 p. 1569875

研究成果: Conference contribution

pulses
crystals
lasers
intervals
scanning electron microscopy
2004
10 引用 (Scopus)

Three-dimensional recording and structuring of chalcogenide glasses by femtosecond pulses

Juodkazis, S., Kondo, T., Rode, A., Matsuo, S. & Misawa, H., 2004, Proceedings of SPIE - The International Society for Optical Engineering. Miyamoto, I., Helvajian, H., Itoh, K., Kobayashi, K. F., Ostendorf, A. & Sugioka, K. (版). 巻 5662. p. 179-184 6 p. 29

研究成果: Conference contribution

Ultrashort pulses
recording
Glass
glass
pulses
2003

Highly integrated transparent microchannel chips for continuous-flow PCR

Sun, K., Matsuo, S. & Misawa, H., 2003, 2003 Nanotechnology Conference and Trade Show - Nanotech 2003. Laudon, M. & Romanowicz, B. (版). 巻 1. p. 86-89 4 p.

研究成果: Conference contribution

Polymerase chain reaction
Microchannels
Tin oxides
Indium
Oxide films

Independence of laser-induced damage threshold of glass on pulse duration for the femto-nanosecond region

Efimov, O., Juodkazis, S., Matsuo, S. & Misawa, H., 2003, OSA Trends in Optics and Photonics Series. Optical Society of American (OSA), 巻 88. p. 1201-1202 2 p.

研究成果: Conference contribution

Glass lasers
Laser damage
Plasmas
Glass
Electrons
12 引用 (Scopus)

Three-dimensional Holographic Recording by Femtosecond Pulses

Juodkazis, S., Kondo, T., Dubikovski, S., Mizeikis, V., Matsuo, S. & Misawa, H., 2003, Proceedings of SPIE - The International Society for Optical Engineering. Weber, H. P., Konov, V. I. & Graf, T. (版). 巻 5147. p. 226-235 10 p.

研究成果: Conference contribution

Ultrashort pulses
recording
beam steering
Hot electrons
Harmonic generation

Three-dimensional optical data storage in a nail for new data transportation

Takita, A., Yamamoto, H., Hayasaki, Y., Nishida, N., Watanabe, M., Matsuo, S. & Misawa, H., 2003, Proceedings of SPIE - The International Society for Optical Engineering. Righini, G. C. & Consortini, A. (版). 巻 4829 II. p. 1104-1105 2 p.

研究成果: Conference contribution

Optical data storage
Nails
data storage
Ultrashort pulses
pulses
9 引用 (Scopus)

Three-dimensional recording by femtosecond pulses in dielectrics

Juodkazis, S., Kondo, T., Mizeikis, V., Matsuo, S., Murata, H. & Misawa, H., 2003, Proceedings of SPIE - The International Society for Optical Engineering. Pique, A., Sugioka, K., Herman, P. R., Fieret, J., Bachmann, F. G., Dubowski, J. J., Hoving, W., Washio, K., Geohegan, D. B., Trager, F. & Murakami, K. (版). 巻 4977. p. 94-107 14 p.

研究成果: Conference contribution

Ultrashort pulses
Photons
recording
Photoresists
photoresists
2002

Coherence, relaxation and reaction of solution-phase molecules studied by femtosecond nonlinear spectroscopy: Vibrational coherence observed in the third order optical process

Tahara, T., Takeuchi, S., Fujiyoshi, S. & Matsuo, S., 2002, Proceedings of SPIE - The International Society for Optical Engineering. Gordienko, V. M., Afanas'ev, A. A. & Shuvalov, V. V. (版). 巻 4752. p. 82-88 7 p.

研究成果: Conference contribution

Vibrational spectroscopy
Stimulated Raman scattering
Excited states
Molecules
Spectroscopy
2 引用 (Scopus)

Laser manipulation of bio-/biomimetic materials

Takasone, T., Juodkazis, S., Matsuo, S., Yamaguchi, A., Sasaki, K., Hotta, J. I. & Misawa, H., 2002, Proceedings of SPIE - The International Society for Optical Engineering. Miyamoto, I., Kobayashi, K. F., Sugioka, K., Poprawe, R. & Helvajian, H. (版). 巻 4830. p. 212-217 6 p.

研究成果: Conference contribution

Biomimetic materials
biomimetics
manipulators
DNA
deoxyribonucleic acid
11 引用 (Scopus)

Microfabrication by a high fluence femtosecond exposure: Mechanism and applications

Watanabe, M., Juodkazis, S., Nishii, J., Matsuo, S. & Misawa, H., 2002, Proceedings of SPIE - The International Society for Optical Engineering. Sugioka, K., Gower, M. C., Haglund, Jr., R. F., Pique, A. & and others, O. (版). 巻 4637. p. 159-168 10 p.

研究成果: Conference contribution

Microfabrication
fluence
Glass
glass
Irradiation
13 引用 (Scopus)

Microstructuring of silica and polymethylmethacrylate glasses by femtosecond irradiation for MEMS applications

Juodkazis, S., Yamasaki, K., Marcinkevičius, A., Mizeikis, V., Matsuo, S., Misawa, H. & Lippert, T., 2002, Materials Research Society Symposium - Proceedings. 巻 687. p. 173-178 6 p.

研究成果: Conference contribution

Polymethyl Methacrylate
Silicon Dioxide
MEMS
Silica
Irradiation
10 引用 (Scopus)

Stereolithography and 3D micro-structuring of transparent materials by femtosecond laser irradiation

Juodkazis, S., Horyama, M., Miwa, M., Watanabe, M., Marcinkevičius, A., Mizeikis, V., Matsuo, S. & Misawa, H., 2002, Proceedings of SPIE - The International Society for Optical Engineering. Panchenko, V. Y. & Golubev, V. S. (版). 巻 4644. p. 27-38 12 p.

研究成果: Conference contribution

Stereolithography
transparence
Microfabrication
Laser beam effects
Ultrashort pulses

Surface plasmon resonance imaging of Au nano-partifcle modified DNA monolayers

Yamaguchi, A., Hayashida, M., Juodkazis, S., Hara, Y., Matsuo, S. & Misawa, H., 2002, Proceedings of SPIE - The International Society for Optical Engineering. Bornhop, D. J., Dunn, D. A., Mariella, Jr., R. P., Murphy, C. J. & and others, O. (版). 巻 4626. p. 247-251 5 p.

研究成果: Conference contribution

Surface plasmon resonance
surface plasmon resonance
Monolayers
DNA
deoxyribonucleic acid
2001
9 引用 (Scopus)

Application of femtosecond Bessel-Gauss beam in microstructuring of transparent materials

Marcinkevičius, A., Juodkazis, S., Mizeikis, V., Matsuo, S. & Misawa, H., 2001, Proceedings of SPIE - The International Society for Optical Engineering. Band, Y. B. (版). 巻 4271. p. 150-158 9 p.

研究成果: Conference contribution

transparence
Gaussian beams
Microfabrication
Stereolithography
Fused silica

Femtosecond laser microfabrication of photonic crystal structures by glass damaging and resin photosolidification

Mizeikis, V., Juodkazis, S., Marcinkevicius, A., Sun, H. B., Kondo, T., Matsuo, S. & Misawa, H., 2001, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 巻 1.

研究成果: Conference contribution

resins
photonics
crystal structure
glass
lasers
1 引用 (Scopus)

Submicrometer lithography by near-field optical microscopy

Juodkazis, S., Arisawa, Y., Matsuo, S., Misawa, H., Tomasiunas, R. & Vaitkus, J., 2001, Proceedings of SPIE - The International Society for Optical Engineering. Asmontas, S. P. & Gradauskas, J. (版). 巻 4318. p. 42-47 6 p.

研究成果: Conference contribution

Lithography
Optical microscopy
Near field scanning optical microscopy
near fields
lithography
9 引用 (Scopus)

Sub-picosecond optical damaging of silica: Time resolved measurements of light induced damage threshold

Juodkazis, S., Marcinkevičius, A., Watanabe, M., Mizeikis, V., Matsuo, S. & Misawa, H., 2001, Proceedings of SPIE - The International Society for Optical Engineering. Exarhos, G. J., Guenther, A. H., Kozlowski, M. R., Lewis, K. L. & Soileau, M. J. (版). 巻 4347. p. 212-222 11 p.

研究成果: Conference contribution

yield point
Time measurement
Silica
time measurement
silicon dioxide
3 引用 (Scopus)

Three-dimensional optical storage inside biological tissue - Bit recording inside nails using infrared femtosecond laser pulses

Takita, A., Yamamoto, H., Hayasaki, Y., Nishida, N., Watanabe, M., Matsuo, S. & Misawa, H., 2001, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. 巻 1.

研究成果: Conference contribution

infrared lasers
recording
pulses
irradiation
thresholds
2000
5 引用 (Scopus)

Formation of photonic crystals by femtosecond laser microfabrication

Misawa, H., Juodkazis, S., Sun, H. B., Matsuo, S. & Nishii, J., 2000, Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 巻 4088. p. 29-32 4 p.

研究成果: Conference contribution

Photopolymerization
Microfabrication
Photonic crystals
Ultrashort pulses
Photons
6 引用 (Scopus)

GaN surface ablation by fs-pulses: atomic force microscopy studies, accumulation effects

Eliseev, P. G., Juodkazis, S., Sugahara, T., Sun, H. B., Matsuo, S., Sakai, S. & Misawa, H., 2000, Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 巻 4065. p. 546-556 11 p.

研究成果: Conference contribution

Ablation
ablation
Laser pulses
Atomic force microscopy
atomic force microscopy
4 引用 (Scopus)

Laser-induced damage threshold and laser processing of GaN

Sun, H. B., Juodkazis, S., Eliseev, P. G., Sugahara, T., Wang, T., Matsuo, S., Sakai, S. & Misawa, H., 2000, Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 巻 3885. p. 311-322 12 p.

研究成果: Conference contribution

Laser damage
yield point
Lasers
Laser pulses
Processing
5 引用 (Scopus)

Laser micro-fabrication/manipulation of dielectric materials

Misawa, H., Juodkazis, S., Marcinkevićius, A., Mizeikis, V., Yamaguchi, A., Sun, H. & Matsuo, S., 2000, Proceedings of the International Symposium on Micro Machine and Human Science. p. 23-33 11 p.

研究成果: Conference contribution

Microfabrication
Near field scanning optical microscopy
Optical data storage
Lasers
Fused silica
41 引用 (Scopus)

Microfabrication by femtosecond laser irradiation

Misawa, H., Sun, H. B., Juodkazis, S., Watanabe, M. & Matsuo, S., 2000, Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 巻 3933. p. 246-260 15 p.

研究成果: Conference contribution

Microfabrication
Laser beam effects
Ultrashort pulses
photonics
transparence
4 引用 (Scopus)

Photonic crystal structures with submicrometer spatial resolution achieved by high power femtosecond laser-induced photopolymerization

Sun, H. B., Xu, Y., Miwa, M., Matsuo, S. & Misawa, H., 2000, Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 巻 3888. p. 122-130 9 p.

研究成果: Conference contribution

Photopolymerization
Photonic crystals
Ultrashort pulses
high power lasers
spatial resolution
9 引用 (Scopus)

Photonic lattices achieved with high-power femtosecond laser microexplosion in transparent solid materials

Sun, H. B., Xu, Y., Juodkazis, S., Sun, K., Nishii, J., Suzuki, Y., Matsuo, S. & Misawa, H., 2000, Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 巻 3888. p. 131-142 12 p.

研究成果: Conference contribution

Optical lattices
Photonic crystals
Ultrashort pulses
high power lasers
Crystal structure
5 引用 (Scopus)

Transient light-induced refractive index change made by laser microfabrication in nitroaniline-doped PMMA film

Yamasaki, K., Juodkazis, S., Watanabe, M., Matsuo, S., Kamada, K., Ohta, K. & Misawa, H., 2000, Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 巻 4088. p. 51-54 4 p.

研究成果: Conference contribution

Microfabrication
Refractive index
refractivity
damage
Lasers