• 6885 引用
  • 43 h指数
19922017

年単位の研究成果

Pureに変更を加えた場合、すぐここに表示されます。

研究成果

フィルター
Conference contribution
2013

Breakdown voltage in silicon carbide metal-oxide-semiconductor devices induced by ion beams

Ohshima, T., Deki, M., Makino, T., Iwamoto, N., Onoda, S., Hirao, T., Kojima, K., Tomita, T., Matsuo, S. & Hashimoto, S., 2013 5 20, Application of Accelerators in Research and Industry - Twenty-Second International Conference. p. 654-658 5 p. (AIP Conference Proceedings; 巻数 1525).

研究成果: Conference contribution

Three-dimensional micro modification and selective etching of crystalline silicon using 1.56-μm subpicosecond laser pulses

Matsuo, S., Oda, K. & Naoi, Y., 2013 10 18, 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 6600555. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: Conference contribution

2012

Formation of nanovoids in femtosecond laser-irradiated single crystals of silicon carbide

Okada, T., Tomita, T., Matsuo, S., Hashimoto, S., Kashino, R. & Ito, T., 2012 12 1, Defects-Recognition, Imaging and Physics in Semiconductors XIV. p. 19-22 4 p. (Materials Science Forum; 巻数 725).

研究成果: Conference contribution

5 引用 (Scopus)
2011

Femtosecond laser modification aiming at the enhancement of local electric conductivities in SiC

Deki, M., Yamamoto, M., Ito, T., Tomita, T., Matsuo, S., Hashimoto, S., Kitada, T., Isu, T., Onoda, S. & Ohshima, T., 2011 12 1, Physics of Semiconductors - 30th International Conference on the Physics of Semiconductors, ICPS-30. p. 119-120 2 p. (AIP Conference Proceedings; 巻数 1399).

研究成果: Conference contribution

Rotation formulas in the jones calculus extended to axially symmetrically polarized beam

Matsuo, S., 2011 12 1, Frontiers in Optics, FiO 2011. (Optics InfoBase Conference Papers).

研究成果: Conference contribution

2010

Electronic properties of femtosecond laser induced modified spots on single crystal silicon carbide

Tomita, T., Iwami, M., Yamamoto, M., Deki, M., Matsuo, S., Hashimoto, S., Nakagawa, Y., Kitada, T., Isu, T., Saito, S., Sakai, K., Onoda, S. & Ohshima, T., 2010 1 1, Silicon Carbide and Related Materials 2009: ICSCRM 2009. Trans Tech Publications Ltd, p. 239-242 4 p. (Materials Science Forum; 巻数 645-648).

研究成果: Conference contribution

3 引用 (Scopus)
2009

Cross-sectional TEM analysis of structural change in 4H-SiC single crystal irradiated by femtosecond laser pulses

Kawahara, H., Okada, T., Kumai, R., Tomita, T., Matsuo, S., Hashimoto, S. & Yamaguchi, M., 2009 1 1, Silicon Carbide and Related Materials 2007. Fuyuki, T., Okumura, H., Fukuda, K., Nishizawa, S., Kimoto, T. & Suzuki, A. (版). Trans Tech Publications Ltd, p. 883-886 4 p. (Materials Science Forum; 巻数 600-603).

研究成果: Conference contribution

Femtosecond laser-induced surface patterning on 4H-SiC

Tomita, T., Kumai, R., Kinoshita, K., Matsuo, S., Hashimto, S., Nagase, H., Nakajima, M. & Suemoto, T., 2009 1 1, Silicon Carbide and Related Materials 2007. Fuyuki, T., Okumura, H., Fukuda, K., Nishizawa, S., Kimoto, T. & Suzuki, A. (版). Trans Tech Publications Ltd, p. 879-882 4 p. (Materials Science Forum; 巻数 600-603).

研究成果: Conference contribution

2 引用 (Scopus)

Laser internal modification plus wet etching for micro-structuring crystalline and glassy materials

Matsuo, S., 2009 1 1, ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. Laser Institute of America, p. 942-945 4 p. (ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings; 巻数 102).

研究成果: Conference contribution

2007

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Tanaka, S. & Misawa, H., 2007 11 26, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 67320B. (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 6732).

研究成果: Conference contribution

6 引用 (Scopus)
2006

Structures of cornets in a homoepitaxially grown 4H-SiC film studied by DUV micro-Raman spectroscopy

Tomita, T., Matsuo, S., Okada, T., Kimoto, T., Mitani, T. & Nakashima, S. I., 2006 12 1, Silicon Carbide and Related Materials 2005, - Proceedings of the International Conference on Silicon Carbide and Related Materials 2005. PART 1 版 p. 339-342 4 p. (Materials Science Forum; 巻数 527-529, 番号 PART 1).

研究成果: Conference contribution

3 引用 (Scopus)
2005

Laser micro fabrication of photoresist rod array using a microlens array

Matsuo, S., Miyamoto, T. & Tomita, T., 2005 12 1, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. p. 1731-1732 2 p. 1569869. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 巻数 2005).

研究成果: Conference contribution

1 引用 (Scopus)

Surface structures of femtosecond laser irradiated 4H-SiC crystal

Tomita, T., Kinoshita, K. & Matsuo, S., 2005 12 1, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. p. 1744-1745 2 p. 1569875. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; 巻数 2005).

研究成果: Conference contribution

1 引用 (Scopus)
2003

Highly integrated transparent microchannel chips for continuous-flow PCR

Sun, K., Matsuo, S. & Misawa, H., 2003 12 1, 2003 Nanotechnology Conference and Trade Show - Nanotech 2003. Laudon, M. & Romanowicz, B. (版). p. 86-89 4 p. (2003 Nanotechnology Conference and Trade Show - Nanotech 2003; 巻数 1).

研究成果: Conference contribution