年別の研究成果
年別の研究成果
検索結果
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2015
Review of development and performance evaluation of active-matrix nanocrystalline Si electron emitter array for massively parallel electron beam direct-write lithography
Ikegami, N., Kojima, A., Miyaguchi, H., Yoshida, T., Yoshida, S., Muroyama, M., Sugata, M., Koshida, N., Totsu, K. & Esashi, M., 2015 6月 1, In: IEEJ Transactions on Sensors and Micromachines. 135, 6, p. 221-229 9 p.研究成果: Review article › 査読