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出版年

  • 2020
  • 2019
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  • 2016
  • 2015
  • 2014
  • 2013
  • 2012
  • 2011

著者

  • Kazuyoshi Ueno
2020

Humidity reliability of commercial flash memories for long-term storage

Murota, T., Mimura, T., Gomasang, P., Yokogawa, S. & Ueno, K., 2020 7 1, : : Japanese Journal of Applied Physics. 59, SL, SLLC01.

研究成果: Article

公開
2019

A novel graphene barrier against moisture by multiple stacking large-grain graphene

Gomasang, P., Kawahara, K., Yasuraoka, K., Maruyama, M., Ago, H., Okada, S. & Ueno, K., 2019 12 1, : : Scientific Reports. 9, 1, 3777.

研究成果: Article

公開
3 引用 (Scopus)
2 引用 (Scopus)

High crystallinity multilayer graphene deposited by a low-temperature CVD using Ni catalyst with applying current

Akimoto, T. & Ueno, K., 2019 3, 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019. Institute of Electrical and Electronics Engineers Inc., p. 351-353 3 p. 8731128. (2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019).

研究成果: Conference contribution

2 引用 (Scopus)
公開
1 引用 (Scopus)

Simultaneous doping / etching (SDE) process of multilayer graphene on Ni for low resistance metallization

Yokosawa, K., Akimoto, T., Okada, Y. & Ueno, K., 2019 3, 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019. Institute of Electrical and Electronics Engineers Inc., p. 47-49 3 p. 8731211. (2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019).

研究成果: Conference contribution

1 引用 (Scopus)

Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst

Fujishima, Y. & Ueno, K., 2019 3, 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019. Institute of Electrical and Electronics Engineers Inc., p. 354-356 3 p. 8731097. (2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019).

研究成果: Conference contribution

2018

Moisture barrier properties of single-layer graphene deposited on Cu films for Cu metallization

Gomasang, P., Abe, T., Kawahara, K., Wasai, Y., Nabatova-Gabain, N., Cuong, N. T., Ago, H., Okada, S. & Ueno, K., 2018 4 1, : : Japanese Journal of Applied Physics. 57, 4, 04FC08.

研究成果: Article

3 引用 (Scopus)

On-chip intercalated-graphene inductors for next-generation radio frequency electronics

Kang, J., Matsumoto, Y., Li, X., Jiang, J., Xie, X., Kawamoto, K., Kenmoku, M., Chu, J. H., Liu, W., Mao, J., Ueno, K. & Banerjee, K., 2018 1 1, : : Nature Electronics. 1, 1, p. 46-51 6 p.

研究成果: Article

22 引用 (Scopus)

Oxidation Structure Change of Copper Surface Depending on Accelerated Humidity

Gomasang, P., Ogiue, S., Ueno, K. & Yokogawa, S., 2018 8 8, 2018 IEEE International Interconnect Technology Conference, IITC 2018. Institute of Electrical and Electronics Engineers Inc., p. 112-114 3 p. 8430461

研究成果: Conference contribution

1 引用 (Scopus)
2017

Asimple test method forelectromigration reliability ofsolder/Cu pillar bumpsusing flat cables

Azuma, N., Owada, M., Abe, T., Nakada, T., Kubota, M. & Ueno, K., 2017 6 13, 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 巻 2017-June. p. 270-272 3 p.

研究成果: Conference contribution

Current enhanced solid phase precipitation (CE-SPP) for direct deposition of multilayer graphene on SiO2 from a Cu capped Co-C layer

Ichikawa, H. & Ueno, K., 2017 6 13, 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 244-246 3 p. 7947583

研究成果: Conference contribution

3 引用 (Scopus)

MoCl5 intercalation doping and oxygen passivation of submicrometer-sized multilayer graphene

Miyazaki, H., Matsumoto, R., Katagiri, M., Yoshida, T., Ueno, K., Sakai, T. & Kajita, A., 2017 4 1, : : Japanese Journal of Applied Physics. 56, 4, 04CP02.

研究成果: Article

7 引用 (Scopus)

Novel in-situ passivation of MoCl5 doped multilayer graphene with MoOx for low-resistance interconnects

Kawamoto, K., Saito, Y., Kenmoku, M. & Ueno, K., 2017 6 13, 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 252-254 3 p. 7947586

研究成果: Conference contribution

1 引用 (Scopus)
2016

Advanced Metallization for ULSI Applications

Nakatsuka, O., Lee, H. J., Park, Y. B., Ueno, K. & Yokogawa, S., 2016 1 1, : : Japanese Journal of Applied Physics. 55, 63, 06J001.

研究成果: Editorial

公開
11 引用 (Scopus)
3 引用 (Scopus)
4 引用 (Scopus)

Synthesis of doped carbon nanotubes by CVD using NiB catalysts

Tomita, K., Kawakami, N., Aozasa, A., Aida, K. & Ueno, K., 2016 7 8, 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016. Institute of Electrical and Electronics Engineers Inc., p. 198-199 2 p. 7507730

研究成果: Conference contribution

2014

Bromine doping of multilayer graphene for low-resistance interconnects

Ueno, K., Kosugi, R., Imazeki, K., Aozasa, A., Matsumoto, Y., Miyazaki, H., Sakuma, N., Kajita, A. & Sakai, T., 2014 5, : : Japanese Journal of Applied Physics. 53, 5 SPEC. ISSUE 2, 05GC02.

研究成果: Article

10 引用 (Scopus)

Improvement of multilayer graphene quality by current stress during thermal CVD

Razak, L. A., Tobino, D. & Ueno, K., 2014 5 25, : : Microelectronic Engineering. 120, p. 200-204 5 p.

研究成果: Article

11 引用 (Scopus)

Properties of electrodeposited germanium thin films

Uchida, Y., Funayama, T., Kogure, Y. & Ueno, K., 2014 11 1, : : Physica Status Solidi (C) Current Topics in Solid State Physics. 11, 11-12, p. 1661-1664 4 p.

研究成果: Article

2 引用 (Scopus)
2013

Heat-Resistant co-w catalytic metals for multilayer graphene chemical vapor deposition

Ueno, K., Karasawa, Y., Kuwahara, S., Baba, S., Hanai, H., Yamazaki, Y., Sakuma, N., Kajita, A. & Sakai, T., 2013 4 1, : : Japanese Journal of Applied Physics. 52, 4 PART 2, 04CB04.

研究成果: Article

5 引用 (Scopus)

Low-resistance metal contacts for nanocarbon/cobalt interconnects

Ueno, K., Takagi, M., Yano, H., Wakui, T., Yamazaki, Y., Sakuma, N., Kajita, A. & Sakai, T., 2013 5 1, : : Japanese Journal of Applied Physics. 52, 5 PART 4, 05FD01.

研究成果: Article

3 引用 (Scopus)
2012
3 引用 (Scopus)

Current induced grain growth of electroplated copper film

Razak, L., Yamaguchi, T., Akahori, S., Hashimoto, H. & Ueno, K., 2012 5 1, : : Japanese Journal of Applied Physics. 51, 5 PART 2, 05EA04.

研究成果: Article

4 引用 (Scopus)

Low-resistance metal contacts to nanocarbon/cobalt interconnects

Takagi, M., Yano, H., Wakui, T., Yamazaki, Y., Sakuma, N., Kajita, A., Sakai;K.Ueno, T. & Ueno, K., 2012 10 23, : : Extended Abstracts of Advanced Metallization Conference 2012::22nd Asian Session. p. 124-125

研究成果: Article

2011

Chemical vapor deposition of nanocarbon on electroless NiB catalyst using ethanol precursor

Tanaka, T., Sato, T., Karasawa, Y. & Ueno, K., 2011 5 1, : : Japanese Journal of Applied Physics. 50, 5 PART 2, 05EF02.

研究成果: Article

3 引用 (Scopus)

Fabrication and Electrical Properties of Nanocarbon/Metal Hybrid Interconnects

M.Takagi, M. T., Wakui, T., Karasawa, Y., Kuwahara, S., Sakuma, N., Kajita, A., Sakai, T. & Ueno, K., 2011 9 14, : : Entended Abstracts of Advanced Metallization Conference 2011: 21st Asian Session. p. 134-135

研究成果: Article

Review of ADMETA Plus 2011 conference topics

Ueno, K. & Kawasaki, H., 2011 12 1, Advanced Metallization Conference 2011. p. 133-142 10 p. (Advanced Metallization Conference (AMC)).

研究成果: Conference contribution