A flexible micromachined planar spiral inductor for use as an artificial tactile mechanoreceptor

Nobuyuki Futai, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Article査読

29 被引用数 (Scopus)

抄録

A micromachined planar spiral inductor was created for use as a passive mechanoreceptor element in a tactile sensor. Simulations and experiments were conducted to examine the change in inductance and the deformation in elements implanted in a silicone rubber medium. The results of both showed that the implanted reception inductors had a reception area specific to their direction. The experiments showed that when the inductors were embedded at a depth of 1 mm in a silicone rubber medium with a Young's modulus of 0.98 MPa, the practical minimal spacing between them was 2 mm, and the practical minimal displacement they could detect was 100 μm. Using a spectrum ranging from 0 to 130 MHz, up to eleven implanted inductors could be measured simultaneously. The fabricated reception inductors had high robustness, high sensitivity, and high repeatability. When several were serially connected using two electrical lines, one single frequency spectrum of the circuit could provide information from all of them.

本文言語English
ページ(範囲)293-303
ページ数11
ジャーナルSensors and Actuators A: Physical
111
2-3
DOI
出版ステータスPublished - 2004 3 15
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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