A half-micron pitch Cu interconnection technology

K.Ueno K.Ueno, K.Ohto K.Ohto, K.Tsunenari K.Tsunenari, Kazuyoshi Ueno

研究成果: Article

1 引用 (Scopus)
元の言語English
ページ(範囲)27-28
ジャーナル1995 Symposium on VLSI Technology Digest of Technical Papers
出版物ステータスPublished - 1996 6 1

これを引用

A half-micron pitch Cu interconnection technology. / K.Ueno, K.Ueno; K.Ohto, K.Ohto; K.Tsunenari, K.Tsunenari; Ueno, Kazuyoshi.

:: 1995 Symposium on VLSI Technology Digest of Technical Papers, 01.06.1996, p. 27-28.

研究成果: Article

K.Ueno, K.Ueno ; K.Ohto, K.Ohto ; K.Tsunenari, K.Tsunenari ; Ueno, Kazuyoshi. / A half-micron pitch Cu interconnection technology. :: 1995 Symposium on VLSI Technology Digest of Technical Papers. 1996 ; pp. 27-28.
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