A high-Throughput screening system for thermoelectric material exploration based on a combinatorial film approach

A high-throughput system that consists of a combinatorial tool (a sputtering deposition tool and a pulsed laser deposition tool) and two developed property screening devices was used for thermoelectric material exploration. The thermoelectric power factor (S²ν, S = Seebeck coefficient, ν = electrical conductivity) screening device allows us to measure electrical conductivity and Seebeck coefficient of over 1000 sample-points within 6h. The thermal effusivity measurement system using the frequency domain thermoreflectance technique allows us to screen thermal conductivity of combinatorial/conventional films. Illustrations of these applications are provided with a Co-Sn-Ce/Si(100) film for power factor determination and with a Ba₂YCu₃O₇/SrTiO₃(100) film for thermal conductivity derivation.