抄録
A high-throughput system that consists of a combinatorial tool (a sputtering deposition tool and a pulsed laser deposition tool) and two developed property screening devices was used for thermoelectric material exploration. The thermoelectric power factor (S2ν, S = Seebeck coefficient, ν = electrical conductivity) screening device allows us to measure electrical conductivity and Seebeck coefficient of over 1000 sample-points within 6h. The thermal effusivity measurement system using the frequency domain thermoreflectance technique allows us to screen thermal conductivity of combinatorial/conventional films. Illustrations of these applications are provided with a Co-Sn-Ce/Si(100) film for power factor determination and with a Ba2YCu3O7/SrTiO3(100) film for thermal conductivity derivation.
本文言語 | English |
---|---|
ページ(範囲) | 05EB021-05EB024 |
ジャーナル | Japanese Journal of Applied Physics |
巻 | 48 |
号 | 5 PART 3 |
DOI | |
出版ステータス | Published - 2009 5月 |
外部発表 | はい |
ASJC Scopus subject areas
- 工学(全般)
- 物理学および天文学(全般)