A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network

Riyo Konno, Misato Mitsui, Hiroki Kuwano, Sumito Nagasawa, Koji Sano, Junichi Hayasaka

研究成果: Conference contribution

10 被引用数 (Scopus)

抄録

This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.

本文言語English
ホスト出版物のタイトルThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
ページ796-799
ページ数4
DOI
出版ステータスPublished - 2007
外部発表はい
イベント6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
継続期間: 2007 10月 282007 10月 31

出版物シリーズ

名前Proceedings of IEEE Sensors

Conference

Conference6th IEEE Conference on SENSORS, IEEE SENSORS 2007
国/地域United States
CityAtlanta, GA
Period07/10/2807/10/31

ASJC Scopus subject areas

  • 電子工学および電気工学

フィンガープリント

「A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル