A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network

Riyo Konno, Misato Mitsui, Hiroki Kuwano, Sumito Nagasawa, Koji Sano, Junichi Hayasaka

研究成果: Conference contribution

9 引用 (Scopus)

抄録

This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.

元の言語English
ホスト出版物のタイトルProceedings of IEEE Sensors
ページ796-799
ページ数4
DOI
出版物ステータスPublished - 2007
外部発表Yes
イベント6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA
継続期間: 2007 10 282007 10 31

Other

Other6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Atlanta, GA
期間07/10/2807/10/31

Fingerprint

Surface waves
Sensor networks
Acoustic waves
Sensors
Natural frequencies
Tensile testing
Micromachining
Quartz
Wireless sensor networks
Crystals
Substrates

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

これを引用

Konno, R., Mitsui, M., Kuwano, H., Nagasawa, S., Sano, K., & Hayasaka, J. (2007). A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. : Proceedings of IEEE Sensors (pp. 796-799). [4388520] https://doi.org/10.1109/ICSENS.2007.4388520

A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. / Konno, Riyo; Mitsui, Misato; Kuwano, Hiroki; Nagasawa, Sumito; Sano, Koji; Hayasaka, Junichi.

Proceedings of IEEE Sensors. 2007. p. 796-799 4388520.

研究成果: Conference contribution

Konno, R, Mitsui, M, Kuwano, H, Nagasawa, S, Sano, K & Hayasaka, J 2007, A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. : Proceedings of IEEE Sensors., 4388520, pp. 796-799, 6th IEEE Conference on SENSORS, IEEE SENSORS 2007, Atlanta, GA, 07/10/28. https://doi.org/10.1109/ICSENS.2007.4388520
Konno, Riyo ; Mitsui, Misato ; Kuwano, Hiroki ; Nagasawa, Sumito ; Sano, Koji ; Hayasaka, Junichi. / A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. Proceedings of IEEE Sensors. 2007. pp. 796-799
@inproceedings{8a74f10095cb4db7becfbddf9dd85919,
title = "A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network",
abstract = "This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.",
author = "Riyo Konno and Misato Mitsui and Hiroki Kuwano and Sumito Nagasawa and Koji Sano and Junichi Hayasaka",
year = "2007",
doi = "10.1109/ICSENS.2007.4388520",
language = "English",
isbn = "1424412617",
pages = "796--799",
booktitle = "Proceedings of IEEE Sensors",

}

TY - GEN

T1 - A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network

AU - Konno, Riyo

AU - Mitsui, Misato

AU - Kuwano, Hiroki

AU - Nagasawa, Sumito

AU - Sano, Koji

AU - Hayasaka, Junichi

PY - 2007

Y1 - 2007

N2 - This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.

AB - This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.

UR - http://www.scopus.com/inward/record.url?scp=48349118680&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=48349118680&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2007.4388520

DO - 10.1109/ICSENS.2007.4388520

M3 - Conference contribution

AN - SCOPUS:48349118680

SN - 1424412617

SN - 9781424412617

SP - 796

EP - 799

BT - Proceedings of IEEE Sensors

ER -