A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network

Riyo Konno, Misato Mitsui, Hiroki Kuwano, Sumito Nagasawa, Koji Sano, Junichi Hayasaka

研究成果: Conference contribution

9 引用 (Scopus)

抜粋

This paper descries a highly sensitive stain sensor using surface wave (SAW) for battery-less wireless sensor network. A SAW strain sensor measuring method by observing a shift of a resonant frequency was fabricated and numerically discussed. The SAW strain sensor having 40MHz resonant frequency was designed and fabricated onto a Quartz crystal substrate by micromachining. Tensile testing was carried out using a specimen made of SS400 as a test piece. Detectable strain of the sensor is below 10-5 orders. Since the resolution of frequency in our measurement system in the test was 100Hz, this result is correct in theoretically. This result shows our sensor sensitivity based on theory will be up to 10-8 orders in the case of the resonant frequency 1GHz and the resolution frequency 1Hz.

元の言語English
ホスト出版物のタイトルThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
ページ796-799
ページ数4
DOI
出版物ステータスPublished - 2007 12 1
外部発表Yes
イベント6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
継続期間: 2007 10 282007 10 31

出版物シリーズ

名前Proceedings of IEEE Sensors

Conference

Conference6th IEEE Conference on SENSORS, IEEE SENSORS 2007
United States
Atlanta, GA
期間07/10/2807/10/31

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • これを引用

    Konno, R., Mitsui, M., Kuwano, H., Nagasawa, S., Sano, K., & Hayasaka, J. (2007). A highly sensitive strain sensor using surface acoustic wave and its evaluation for wireless battery-less sensor network. : The 6th IEEE Conference on SENSORS, IEEE SENSORS 2007 (pp. 796-799). [4388520] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.4388520