A Micro Electric Power Generator Using Cantilever Consisting of Silicon and Polymer

Yasunori Wada, Takahumi Suzuki, Sumito Nagasawa, Hiroshi Okamoto, Hiroki Kuwano

研究成果: Article › 査読

本文言語	English
ページ（範囲）	37-38
ジャーナル	Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),
出版ステータス	Published - 2010 6月 29

引用スタイル

@article{8fc74ffff9834eecb127a39be61b5306,

title = "A Micro Electric Power Generator Using Cantilever Consisting of Silicon and Polymer",

author = "Yasunori Wada and Takahumi Suzuki and Sumito Nagasawa and Hiroshi Okamoto and Hiroki Kuwano",

year = "2010",

month = jun,

day = "29",

language = "English",

pages = "37--38",

journal = "Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),",

}

TY - JOUR

T1 - A Micro Electric Power Generator Using Cantilever Consisting of Silicon and Polymer

AU - Wada, Yasunori

AU - Suzuki, Takahumi

AU - Nagasawa, Sumito

AU - Okamoto, Hiroshi

AU - Kuwano, Hiroki

PY - 2010/6/29

Y1 - 2010/6/29

M3 - Article

SP - 37

EP - 38

JO - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),

JF - Proceedings of the 3rd Symposium on Micro Environmental Machine Systems (μEMS2010),

ER -