TY - JOUR
T1 - A micro-structured Si-based electrodes for high capacity electrical double layer capacitors
AU - Krikscikas, Valdas
AU - Oguchi, Hiroyuki
AU - Yanazawa, Hiroshi
AU - Hara, Motoaki
AU - Kuwano, Hiroki
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2014
Y1 - 2014
N2 - We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm2, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.
AB - We challenged to make basis for Si electrodes of electric double layer capacitors (EDLC) used as a power source of micro-sensor nodes. Mcroelectromechanical systems (MEMS) processes were successfully introduced to fabricate micro-structured Si-based electrodes to obtain high surface area which leads to high capacity of EDLCs. Study of fundamental properties revealed that the microstructured electrodes benefit from good wettability to electrolytes, but suffer from electric resistance. We found that this problem can be solved by metal-coating of the electrode surface. Finally we build an EDLC consisting of Au-coated micro-structured Si electrodes. This EDLC showed capacity of 14.3 mF/cm2, which is about 530 times larger than that of an EDLC consisting of flat Au electrodes.
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U2 - 10.1088/1742-6596/557/1/012045
DO - 10.1088/1742-6596/557/1/012045
M3 - Conference article
AN - SCOPUS:84915821076
VL - 557
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012045
T2 - 14th International Conference on Micro- and Nano-Technology for Power Generation and Energy Conversion Applications, PowerMEMS 2014
Y2 - 18 November 2014 through 21 November 2014
ER -