A multi-transducer near field acoustic levitation system for noncontact transportation of large-sized planar objects

Takafumi Amano, Yoshikazu Koike, Kentaro Nakamura, Sadayuki Ueha, Yoshiki Hashimoto

研究成果: Article査読

19 被引用数 (Scopus)

抄録

A new noncontact transportation system, which consists of multiple ultrasonic transducers and operates based on near-field acoustic levitation, is proposed to transport a large-sized planar object such as a glass substrate for liquid crystal devices. Using the proposed systems consisting of two and three transducers, the suspension characteristics of the levitated objects are studied as functions of both size difference and angles between the vibration systems and the levitated object. As a result, the holding force is proved to increase as the angle increases and is maximum when the horizontal dimensions of the system and the object coincide.

本文言語English
ページ(範囲)2982-2985
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
39
5 B
DOI
出版ステータスPublished - 2000
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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