A New Characterization Technique for Depth-Dependent Dielectric Properties of High-k Films by Open-Circuit Potential Measurement

K. Kita, M. Sasagawa, K. Kyuno, A. Torium

研究成果: Article査読

本文言語English
ページ(範囲)166-170
ジャーナル2003 Int. Conference on Characterization and Metrology for ULSI Technology; AIP Conf. Proceedings 550
出版ステータスPublished - 2003 3 1

引用スタイル