A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: Fabrication and characterization

P. A. Tuan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, H. Kuwano

研究成果

抄録

In the first half of this paper we reports on the development of a Fe-B-Nd-Nb quaternary alloy magnetic metallic glass thin film. The Fe-B-Nd-Nb thin film deposited on the Si (100) substrate underwent crystallographic and thermal characterization to confirm its metallic glass state. In the second half of this paper we reports on the direct fracture toughness of the micro structure composed of the Fe-B-Nd-Nb metallic glass thin film using the micro device specially designed. The measurement revealed that the fracture toughness of the Fe-B-Nd-Nb metallic glass thin film is 6.4 MPa·m1/2, which is about four times higher than that of silicon.

本文言語English
ホスト出版物のタイトル2013 Transducers and Eurosensors XXVII
ホスト出版物のサブタイトルThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
ページ1040-1043
ページ数4
DOI
出版ステータスPublished - 2013
外部発表はい
イベント2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
継続期間: 2013 6 162013 6 20

出版物シリーズ

名前2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Conference

Conference2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
国/地域Spain
CityBarcelona
Period13/6/1613/6/20

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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