@inproceedings{8c1de87e08ca450289ece05dd3cbabf1,
title = "A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: Fabrication and characterization",
abstract = "In the first half of this paper we reports on the development of a Fe-B-Nd-Nb quaternary alloy magnetic metallic glass thin film. The Fe-B-Nd-Nb thin film deposited on the Si (100) substrate underwent crystallographic and thermal characterization to confirm its metallic glass state. In the second half of this paper we reports on the direct fracture toughness of the micro structure composed of the Fe-B-Nd-Nb metallic glass thin film using the micro device specially designed. The measurement revealed that the fracture toughness of the Fe-B-Nd-Nb metallic glass thin film is 6.4 MPa·m1/2, which is about four times higher than that of silicon.",
keywords = "fracture toughness, MEMS, metallic glass thin film",
author = "Tuan, {P. A.} and H. Oguchi and M. Hara and M. Shikida and H. Hida and T. Ando and K. Sato and H. Kuwano",
year = "2013",
doi = "10.1109/Transducers.2013.6626948",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "1040--1043",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}