TY - JOUR
T1 - A new technique for controlling the dopant concentration in the double-crucible method
AU - Ono, Naoki
AU - kida, Michio
AU - Arai, Yoshiaki
AU - Abe, Keisei
AU - Sahira, Kensho
PY - 1994/1
Y1 - 1994/1
N2 - A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.
AB - A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.
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U2 - 10.1016/0022-0248(94)90763-3
DO - 10.1016/0022-0248(94)90763-3
M3 - Article
AN - SCOPUS:0028193842
VL - 135
SP - 359
EP - 364
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
SN - 0022-0248
IS - 1-2
ER -