A new technique for controlling the dopant concentration in the double-crucible method

Naoki Ono, Michio kida, Yoshiaki Arai, Keisei Abe, Kensho Sahira

研究成果: Article査読

9 被引用数 (Scopus)

抄録

A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.

本文言語English
ページ(範囲)359-364
ページ数6
ジャーナルJournal of Crystal Growth
135
1-2
DOI
出版ステータスPublished - 1994 1月
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 無機化学
  • 材料化学

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