@article{3dbcd2ad8dfa415186c3f511818ed99f,
title = "A Newly Developed High-Speed Rotating Disk CVD Equipment for Poly-Si Films",
author = "F. Terai and H. Kobayashi and S. Katsui and Y. Sato and T. Nagatomo and T. Homma",
year = "2005",
month = jan,
day = "11",
language = "English",
volume = "44",
pages = "125--130",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
}