The selective meltback morphology of InP was investigated both experimentally and numerically by solving the two-dimensional diffusion equation, taking into account the displacement of the solid-liquid interface. It was found experimentally that the morphology of the groove varied from convex to nearly flat and then to concave against the melt as the meltback time increased. The result was compared with that of the numerical calculation. The transition from a nonuniform morphology to a smooth morphology was found to occur as a result of the dense concentration of solute atoms around the edges of the groove.
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