A numerical study of the influence of feeding polycrystalline silicon granules on melt temperature in the continuous Czochralski process

Naoki Ono, Michio Kida, Yoshiaki Arai, Kensho Sahira

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Temperature change was simulated using a solid body rotating melt model when solid polycrystalline silicon granules were supplied to a melt in a double-crucible method. Only heat conduction was considered in the analysis. The influence of the crucible rotation rates and of the initial temperature of the supplied silicon was investigated systematically and quantitatively. The influence of the crucible rotation rate was stronger than expected, which suggests that the crucible rotation rate cannot be lowered too much because of the possibility of the melt solidifying between the inner and outer crucibles.

本文言語English
ページ(範囲)297-304
ページ数8
ジャーナルJournal of Crystal Growth
132
1-2
DOI
出版ステータスPublished - 1993 9 1
外部発表はい

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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