A Numerical Study on the Macroscopic Kinetics of the Ring-OSF in the Silicon CZ Growth by the Model Using Self-Interstitials as the Dominant Diffusers.

Naoki Ono, Kazuhiro Harada, Jun Furukawa, Kazuya Suzuki, Michio Kida, Yasushi Shimanuki

研究成果: Article

元の言語English
ページ(範囲)503-514
ジャーナルElectrochemical Society "Semiconductor Silicon 1998" meeting proceeding
1998-1
出版物ステータスPublished - 1998 5 1

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