A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials

T.Homma T.Homma, H.Kokubun H.Kokubun, A.Takasaki A.Takasaki, H.Machida H.Machida, M.Yamaguchi M.Yamaguchi, Tetsuya Homma

研究成果: Article › 査読

7 被引用数 (Scopus)

本文言語	English
ページ（範囲）	580-585
ジャーナル	Journal of the Electrochemical Society
巻	147
出版ステータス	Published - 2000 2月 1

引用スタイル

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title = "A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials",

author = "T.Homma T.Homma and H.Kokubun H.Kokubun and A.Takasaki A.Takasaki and H.Machida H.Machida and M.Yamaguchi M.Yamaguchi and Tetsuya Homma",

year = "2000",

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journal = "Journal of the Electrochemical Society",

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T1 - A process for Copper Films Deposition by Pyrolysis of Organic Copper Materials

AU - T.Homma, T.Homma

AU - H.Kokubun, H.Kokubun

AU - A.Takasaki, A.Takasaki

AU - H.Machida, H.Machida

AU - M.Yamaguchi, M.Yamaguchi

AU - Homma, Tetsuya

PY - 2000/2/1

Y1 - 2000/2/1

M3 - Article

VL - 147

SP - 580

EP - 585

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

SN - 0013-4651

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