A surface acoustic wave dynamics control device by grating structure

Masahiro Miyashita, Teppei Onuki, Sumito Nagasawa, Hiroshi Kuwano

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We have developed the dynamic controlling system of surface acoustic wave (SAW) using micro electromechanical structures, using a plate with periodic convex structures as a mechanical switch of the SAW's resonant condition. The effects of the geographical change on the substrate surface by the active control were investigated using the numerical analysis. And we verified the effect of spectrum shaping by the engraved grating structure, and the controlling effect of the resonant condition with the control plate on the grating structure experimentally.

本文言語English
ホスト出版物のタイトルMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
ページ661-664
ページ数4
DOI
出版ステータスPublished - 2008 8 29
外部発表はい
イベント21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
継続期間: 2008 1 132008 1 17

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
CountryUnited States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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