A surface acoustic wave dynamics control device by grating structure

Masahiro Miyashita, Teppei Onuki, Sumito Nagasawa, Hiroshi Kuwano

研究成果: Conference contribution

2 引用 (Scopus)

抄録

We have developed the dynamic controlling system of surface acoustic wave (SAW) using micro electromechanical structures, using a plate with periodic convex structures as a mechanical switch of the SAW's resonant condition. The effects of the geographical change on the substrate surface by the active control were investigated using the numerical analysis. And we verified the effect of spectrum shaping by the engraved grating structure, and the controlling effect of the resonant condition with the control plate on the grating structure experimentally.

元の言語English
ホスト出版物のタイトルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ページ661-664
ページ数4
DOI
出版物ステータスPublished - 2008
外部発表Yes
イベント21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ
継続期間: 2008 1 132008 1 17

Other

Other21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Tucson, AZ
期間08/1/1308/1/17

Fingerprint

Surface waves
Acoustic waves
Numerical analysis
Dynamical systems
Switches
Substrates

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

これを引用

Miyashita, M., Onuki, T., Nagasawa, S., & Kuwano, H. (2008). A surface acoustic wave dynamics control device by grating structure. : Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 661-664). [4443743] https://doi.org/10.1109/MEMSYS.2008.4443743

A surface acoustic wave dynamics control device by grating structure. / Miyashita, Masahiro; Onuki, Teppei; Nagasawa, Sumito; Kuwano, Hiroshi.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 661-664 4443743.

研究成果: Conference contribution

Miyashita, M, Onuki, T, Nagasawa, S & Kuwano, H 2008, A surface acoustic wave dynamics control device by grating structure. : Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4443743, pp. 661-664, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, 08/1/13. https://doi.org/10.1109/MEMSYS.2008.4443743
Miyashita M, Onuki T, Nagasawa S, Kuwano H. A surface acoustic wave dynamics control device by grating structure. : Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. p. 661-664. 4443743 https://doi.org/10.1109/MEMSYS.2008.4443743
Miyashita, Masahiro ; Onuki, Teppei ; Nagasawa, Sumito ; Kuwano, Hiroshi. / A surface acoustic wave dynamics control device by grating structure. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2008. pp. 661-664
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