Adaptive control for piezo-Actuated stage

研究成果: Conference contribution

抜粋

The piezo-Actuated XY-Table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-Table is a challenging task. This paper discusses the high precision adaptive control for the XY-Table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

元の言語English
ホスト出版物のタイトル1st International Conference on Industrial Artificial Intelligence, IAI 2019
出版者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781728135939
DOI
出版物ステータスPublished - 2019 7
イベント1st International Conference on Industrial Artificial Intelligence, IAI 2019 - Shenyang, China
継続期間: 2019 7 222019 7 26

出版物シリーズ

名前1st International Conference on Industrial Artificial Intelligence, IAI 2019

Conference

Conference1st International Conference on Industrial Artificial Intelligence, IAI 2019
China
Shenyang
期間19/7/2219/7/26

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Artificial Intelligence
  • Computer Science Applications
  • Industrial and Manufacturing Engineering
  • Control and Optimization

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  • これを引用

    Chen, X. (2019). Adaptive control for piezo-Actuated stage. : 1st International Conference on Industrial Artificial Intelligence, IAI 2019 [8850789] (1st International Conference on Industrial Artificial Intelligence, IAI 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICIAI.2019.8850789