TY - GEN
T1 - Adaptive control for piezo-Actuated stage
AU - Chen, Xinkai
N1 - Funding Information:
This work is supported in part by the Grantsin-Aid for Scientific Research of Japan Society for the Promotion of Science (JSPS) under Grant C-15K06152, Grant C-18K04212, and Grant 14032011-000073.
Publisher Copyright:
© 2019 IEEE.
PY - 2019/7
Y1 - 2019/7
N2 - The piezo-Actuated XY-Table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-Table is a challenging task. This paper discusses the high precision adaptive control for the XY-Table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
AB - The piezo-Actuated XY-Table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-Table is a challenging task. This paper discusses the high precision adaptive control for the XY-Table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.
UR - http://www.scopus.com/inward/record.url?scp=85073504090&partnerID=8YFLogxK
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U2 - 10.1109/ICIAI.2019.8850789
DO - 10.1109/ICIAI.2019.8850789
M3 - Conference contribution
AN - SCOPUS:85073504090
T3 - 1st International Conference on Industrial Artificial Intelligence, IAI 2019
BT - 1st International Conference on Industrial Artificial Intelligence, IAI 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 1st International Conference on Industrial Artificial Intelligence, IAI 2019
Y2 - 22 July 2019 through 26 July 2019
ER -