Adaptive control for piezo-actuated XY-table

Xinkai Chen, Makoto Hattori

研究成果: Conference contribution

抄録

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

本文言語English
ホスト出版物のタイトル2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
ページ2089-2094
ページ数6
DOI
出版ステータスPublished - 2011 11 17
イベント2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China
継続期間: 2011 8 72011 8 10

出版物シリーズ

名前2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011

Conference

Conference2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
国/地域China
CityBeijing
Period11/8/711/8/10

ASJC Scopus subject areas

  • 人工知能
  • 電子工学および電気工学
  • 機械工学

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