Adaptive high precision control for piezo-actuated nano-positioner

Toshikuni Ozaki, Xinkai Chen

研究成果: Conference contribution

抜粋

The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl- Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.

元の言語English
ホスト出版物のタイトル2010 IEEE International Symposium on Intelligent Control, ISIC 2010
ページ2278-2283
ページ数6
DOI
出版物ステータスPublished - 2010 11 30
イベント2010 IEEE International Symposium on Intelligent Control, ISIC 2010 - Yokohama, Japan
継続期間: 2010 9 82010 9 10

出版物シリーズ

名前IEEE International Symposium on Intelligent Control - Proceedings

Conference

Conference2010 IEEE International Symposium on Intelligent Control, ISIC 2010
Japan
Yokohama
期間10/9/810/9/10

    フィンガープリント

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Modelling and Simulation
  • Computer Science Applications
  • Electrical and Electronic Engineering

これを引用

Ozaki, T., & Chen, X. (2010). Adaptive high precision control for piezo-actuated nano-positioner. : 2010 IEEE International Symposium on Intelligent Control, ISIC 2010 (pp. 2278-2283). [5612884] (IEEE International Symposium on Intelligent Control - Proceedings). https://doi.org/10.1109/ISIC.2010.5612884